Compact Cylinder with Lock Series CLQ

68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 36 42 39.2 43.2 21.2 23.2 9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) VH1 W1 X H1 H2 L1 C1 20.5 23 12 14.5 14 17.5 12 15 M8 x 1.25 M10 x 1.25 5 6 18.5 22.5 20 25 20 25 7 Compact Cylinder with Lock Series

AS-FG/ASD-FG

10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 M5 x 0.8 6, 10, 16, 20 AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MXW Non-rotating accuracy M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

KP/KPQ/KPG

T 04 06 08 10 12 4 6 8 10 12 VMG Construction M5 type Male connector Description Material Component Parts No.

Plate Cylinder

K H ZZ + Stroke (mm) A 22 26 30 35 35 AL 19.5 23.5 27 32 32 B 24 28 32 39 50 BS 37 45 44 54 53 BT M5 x 0.8 depth 7.5 M6 x 1 depth 12 M8 x 1.25 depth 13 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 BX 9 6.5 8 10 11 BY 7 8 9 9 12 C 54 68 86 104 124 D 12 14 16 20 20 ET M5 x 0.8 depth 11 M6 x 1 depth 11 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

MY1

Operating range MY1MW (Slide bearing guide type) MY1CW (Cam follower guide type) (mm) (mm) Auto switch model Bore size Auto switch model Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 63 D-A9 D-A9 11 7.5 11 7.5 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-M9/M9V D-M9W/M9WV D-M9A/M9AV 7.5 7.5 8.5 8.5 9.5 7 6 7.5 7.5 7 8 8.5 7 6 D-Z7/Z80 D-Z7/Z80 12 12 12 11.5 11.5 12 12 12 11.5 11.5 D-Y59/Y69 D-Y7P

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

MHY2/MHW2

MHW2 Dimensions MHW2-25D Flat finger (Standard) 24 2-M6 X 1 Depth 10 (Mounting thread) 20 69 51 40 27 4-M6 X 1 Depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 2-M6 X 1 Depth 12 (Mounting thread) 30 34 45 24 27 8 2 20 +0.2 +0.1 17 26H9 +0.052 Depth 3 0 30 21 40 4-M5 X 0.8 Depth 6 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) Auto switch mounting groove

Air Slide Table Series MXW

MXS MXQ 8 x M5 x 0.8 thread depth 13 Note) MXF 6H9 + 0.030 0 depth 5.5 (Insert) 6H9 + 0.030 0 depth 5.5 7 MXW MXJ 72 98 48 MXP MXY Y Y 25 160 40 L 40 40 MTS 11 24 24 K A 60 50 32.5 Z A Bottom through-hole 5.1 N x M6 x 1 thread depth 12 (N-1) x H G H 7 GG HH 6H9 + 0.030 0 depth 5.5 NN x M6 x 1 thread depth 12 Bottom through-hole 5.1 F E 6H9 + 0.030 0 depth 5.5 (mm) DHH H J K L E N F NN G Z

Compact Guide Cylinder

30 st 100 st or less Over 100 st 12 43 22 50 37 47 33 20 40 110 15 25 60 20 3 3.5 M5 x 0.8 10 5 16 49 24 57 42 51 37 20 22 42 110 15 16 26 60 24 3 3.5 M5 x 0.8 10 5 20 60 28.5 71 49 66 44 24 44 120 30 40 78 28 3 3.5 M6 x 1 12 18 25 73 34 86 60 78 50 24 44 12 29 39 77 34 4 4.5 M6 x 1 12 17 [mm] MGPKL: A, DB, and E Dimensions Bore size [mm] A DB E 30 st or less Over 30 st 100 st or less Over

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

CQM

x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 7-5-6 7 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Dimensions 12 to 25 CUJ CU V V 16 12

Compact

28 VDC or less 2.5 to 40 mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

5 Port Solenoid Valve SY Series

connector SY9 20 SY3 40 SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

Microspeed Cylinder

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

Speed Controller with One-touch Fitting

) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03