Silencer Series AN

Performance Sonic conductance C [dm3/(sbar)] Effective area mm2 Weight g Recommended flow m3/min(ANR) Model AN500-06 AN600-10 AN700-12 AN800-14 AN900-20 32 12 or less 160 165 54 20 or less 270 220 88 30 or less 440 435 118 50 or less 590 510 192 80 or less 960 740 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

2/3 Port Valve for Various

LVA Connection LVH 3 8 1 2 3 4 03 04 06 10 12 14 20 LVD Refer to the table (2) given below for availability. Thread 1 1 1 2 LVQ 1 4 1 2 Refer to page 17-3-16 for ordering coil only. LQ Thread type Nil T F N For 32A For 40A For 50A 32 40 50 Rc NPTF G NPT Flange LVN Refer to the table (1) given below for availability.

KJ

(mm) Applicable fitting size d 4 6 6 Applicable tubing Note) Weight (g) Model D L A M KJR23-04 KJR23-06 KJR04-06 8.4 32 33 19.3 19.5 33.5 9.3 0.9 1.1 1.3 Note) D: Max. diameter 3.2 12.7 3 2.5 4 20 12.7 4 4 Applicable fitting Bulkhead Union: KJE H (width across flats) Effective area (mm2) Applicable tubing O.D.

Title not found

Drarn guide 1/4 AF30 to 60 Flow direclion: Right to tefl AF10 to 60 Drain cock wiih barb fitting: 06 x 04 nylon tube AF30 to 60 Nole 1)Without a valve Display unils for product name piEle and cauion plate lor bowl :PSl,'F AF10 to 60 lypes M5 and NPT Port size syn P9d ro stze 20 30 40 50 GO l\r5 a '|8 a 1t4 a a a 3t8 a a a 3/4 a a '1 a a Float lype auto drain (N.O.)

Series AK1000

10 20 Connections (Inletq, Outletw) No code P 4) Panel mounting hole: dia. 1.42 inch (36.1 mm).

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Micro Mist Separator Series AFD20/30/40

Applicable model AFD20 to 40 Nylon bowl Symbol Nil B Body size Body size Port size Metal bowl with level gauge Symbol 20 30 40 AV 20 30 40 (3) Thread type With bowl guard 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 (5) (4) C AFD20 to 40 Nil N (1) Drain guide 1/4 Rc AU Flow direction: Right Left NPT (4) D AFD30/40 Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl

Mist Separator Series AFM20/30/40

, AFM40-06 Drain cock with barb fitting With drain guide With auto-drain (N.C.)

AC Servo Motor Driver (Network card type ）

(P980) . 20-19 20.4.4 Identification & Maintenance (I&M) . 20-20 20.4.5 Reset To Factory . 20-21 20.5 STATE TRANSITION . 20-22 20.5.1 Basic State Machine . 20-22 20.5.2 FSA state . 20-25 20.5.3 Controlword/Statusword . 20-27 20.5.3.1 Controlword . 20-27 20.5.3.2 Statusword . 20-30 20.6 CONTROL MODE . 20-36 20.6.1 Selection of control mode . 20-36 20.6.2 Control switching . 20-37 20.6.3 Profile

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 22 27 27 32 41 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 8 11 11 13 16 59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16

Combination Cylinder

26 27 26 30 31 54 59 67 72 76 8 11 11 13 16 10 13 18 23 25 10 12 15 17 19 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 Bore (mm) W/o rod boot W/ rod boot J K KA L LZ MM N P PG PH PL PW RR S U W H 51 58 58 71 72 ZZ 14 18 18 22 26 Z 244 273 296 347 381 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 h

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R port Rc(PT) 1 8 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side How to Order 41 Type (5 Port/Base mounted) SS5YJ5-41-05 --M5 Stations 2 stations 02 : R port Rc(PT) : 1 8 20 stations 20 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side P port Rc(PT) 1 8 Applicable solenoid

KDM

No. of connecting tubes Model Weight Color of release button KDM10-23 KDM10-04 KDM10-06 KDM10-08 KDM20-23 KDM20-04 KDM20-06 KDM20-08 3.2 4 6 300 g 10 520 g 8 3.2 Blue 520 g 4 6 8 20 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

KN Series Nozzles for Blowing

Weight (g) L1 M Width across flats H1 H2 Nozzle size D Model KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 13 14 19 20 22 28 30 35 36 37 30 28 54 55 40 77 79 117 112 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 27 27.7 30.1 30.8 31.5 33.8

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

Hydraulic Filters

-196H-V 06 to 08 AL-197H-V 10 to 12 FKM-70 or EPDM-70 AL-198H-V Phosphoric ester 16 AL-199H-V 20 to 24 AL-200H-V 28 to 32 AL-201H-V Note) The material of seals (AL-196H-V to AL-201H-V) is EPDM-70.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Position for light mounting) Socket Terminal block Shaved part Terminal thread (3 positon) Hook Part No. of DIN Connector (Based on DIN) Without light AXT100-20-1 With light Rated voltage Voltage symbol Part No. 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with light