Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: 1/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Bottom, Port Size: 3/8, Thread: NPTF, Control Unit: -, Voltage: -

PFxx-OMJ0005CN

PFM725 PFM750 PFM711 N2ArCO2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) N2Ar 0.210 L/min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052

DOC1023125

Set stroke is outside the stroke limit. (052) B Input RESET If this alarm occurs, please input the reset signal, and then instruct the operation again. Return to the origin is not completed within the set time. Return to the origin was not completed within the set time (097) C Input Check if the movement of the actuator was interrupted.

DOC1023126

Set stroke is outside the stroke limit. (052) B Input RESET If this alarm occurs, please input the reset signal, and then instruct the operation again. Return to the origin is not completed within the set time. Return to the origin was not completed within the set time (097) C Input Check if the movement of the actuator was interrupted.

High performance type Step Motor Controller (Servo/24 VDC)

(Including JOG operation after return to origin) The stroke is outside the stroke limit. (01-052) Make sure that the basic parameter, "Stroke (+)" and "Stroke (-)" are consistent with the distance of the electric actuator movement specified in the step data. limit B RESET Stroke input Caution If the operation method of step data is INC, take care with the position where operation

JXCx-OMY0008

Set stroke is outside the stroke limit. (01-052) Stroke limit B RESET Caution If the operation method of step data is "relative coordinated movement", note the location where the operation starts and the distance traveled. If the location is out of the stroke range when the power is supplied, this alarm is generated. Move the table within stroke range, and supply power. -61No.

JXCx-OMY0006

Set stroke is outside the stroke limit. (01-052) Stroke limit B RESET Caution If the operation method of step data is "relative coordinated movement", note the location where the operation starts and the distance traveled. If the location is out of the stroke range when the power is supplied, this alarm is generated. Move the table within stroke range, and supply power. -64No.

JXCx-OMY0004

Set stroke is outside the stroke limit. (01-052) Stroke limit B RESET Caution If the operation method of step data is "relative coordinated movement", note the location where the operation starts and the distance traveled. If the location is out of the stroke range when the power is supplied, this alarm is generated. Move the table within stroke range, and supply power. -66No.

JXCx-OMT0005CN

B RESET >+JOG (01-052) >+B RESET 65 - 112 12 0 2 3 4 5 6 7 Alarm _Comment _058 (01-058) 3A B RESET No.base PLC <> 1 1ABS 2INC 2PLC 2 14.2[2] (P.54) Alarm _Comment _061 (01-061) 3D B RESET <>+ <>+Alarm _Comment _062 (01-062) 3E B RESET <> (01-096) C RESET <> (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF

SFOD-OMT0005CN

B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

SFOD-OMT0009CN

(0-149) D RESET SVON <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> 87 No.SFOD-OMT0009CN-B code <> FROM FROM (0-912) E <> <> Modbus (CI 1 2 CI 3 4)OFF <> Modbus (0-913) E <> (0-914) E <> 88 No.SFOD-OMT0009CN-B (2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B <> RESET <> + JOG <> + (1-052

JXCx-OMU0026

Set stroke is outside stroke limit. (052) B RESET is ON Caution If the step data operation method is a relative movement, note the location where the operation starts and the distance moved. If the location is outside the stroke range when power is supplied, this alarm will be generated. Move the table to within the stroke range, and supply power.

JXCx-OMT0001CN

code <> FROM FROM Error (0-912) E <> <> Modbus (CI 1 Modbus Error (0-913) E 2 CI 3 4)OFF <> <> Module Error (0-914) E <> -87No.JXC-OMT0001CN-C (2) code <> [] (1) (2) >0 (3) (4) (5) (6) (7) Step data value is wrong (1-048) B RESET ON <> <> [] (1) (-)<(+) (2) < Parameter value is wrong (1-049) B RESET ON <> <> + JOG Set stroke is outside stroke <> + B RESET ON limit. (1-052

LECA6_C

B RESET PLC 15ms30ms 2(P.40) 49 - +JOG 1-052 B RESET +1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) 1 [] A [a ] C RESET 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESETS VON (1) D 50 - ON (M24V) 1-145 RESETS VON (1) D 1-146 RESETS VON (1) D (C24V) RESETS VON (1) 1-147

LECP6_C

B RESET 49 - +JOG +1-052 B RESET 1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON

Step Motor Driver （ Pulse input type ）

RESET Stroke limit (1-052) B SVON input Make sure that the basic parameter, Stroke (+) and Stroke (-) are consistent with the distance of electric actuator movement specified in the step data. 1. Return to origin is not completed within the set time. 2. Return to origin parameter has the conditions shown below.

JXCx-OMT0028CN

B () PLC 15ms(30ms) 61 - (+) (-) (JOG ) () (1-052) RESET (+) (-) B (1-096) RESET C 0 (1-097) RESET C 2,3: OFF (EMG ) OFF (1-098) RESET JOG ON (SVRE ON) EMG OFF DRV C DC24v DRIVE (1-099) RESET SETOFF DRV C 0: () 1: OFF 0: a 2: OFF B (1-103) 0: C RESET OFF ON 1: a 2,3: 2: OFF ON B 0 "0" 2 3 62 - () (1-106) RESET SVON C 1 (1-144) RESET SVON D ON (M24V

IDX-OM-W037

Operation/ Shutdown 3.10.6 PID manual setting CH1 PID (control parameter) P Proportion band (050) i Integral time (051) d Derivative time (052) PID(proportion band / integral time / derivative time) is manually set. [ Setting range] P: 0.1 to 999.9 I: 0 to 3200 sec. D: 0.0 to 999.9 sec. PID values are automatically set by auto tuning.

JXCx-OMT0002

Set stroke is outside stroke limit. (1-052) B RESET is ON Caution If the step data operation method is a relative movement, note the location where the operation starts and the distance moved. If the location is outside the stroke range when power is supplied, this alarm will be generated. Move the table to within the stroke range, and supply power. -88No.