SMC

10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 NA 2 2 2 2 2 2 4 4 4 HA 35 35 35 35 35 70 70 76 88 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125

VQ4000

L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) L n Dimensions L n Dimensions 8 263 276 L1 L2 7 238 251 8 263 276 L1 L2 6 213 226 7 238 251 5 188 201 6 213 226 4 163 176 5 188 201 3 138 151 4 163 176 1 2 113 126 3 138 151 1 2 113 126 88 101 88 101 L n L n 9 288 301 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 9 288 301 16 463 476 15 463 476 14 413 426

LEY-OM007

1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12- 3.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

SFOD-OMT0010

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2.

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

PSE530

Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part

Compact Vacuum Ejector Series ZA

Approx. 3000 P 6.4 10 9 5 Suction filter 2 x 2.7 V V 10 23 9.9 Supply adapter (Mounting hole) ZA1 1 K1 FP B Note) When the body is mounted, tighten with a torque of 0.6 0.06 Nm.

Multi-channel Digital Sensor Monitor

Refer to the table for each pressure specification (page 80) Display/set pressure range Display/min. setting unit Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max. Electric spec.

Series VCS

) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (

PSE200

Pressure sensor/Sensor range Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) 101 to 101kPa PSE533 10 to 101kPa 10 to 101kPa 0.1 to 1MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor SET If the controller is equipped with a unit switching function, unit setting can be changed.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Pressure sensor/Sensor range Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) 101 to 101kPa PSE533 10 to 101kPa 10 to 101kPa 0.1 to 1MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor SET If the controller is equipped with a unit switching function, unit setting can be changed.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

ZP

10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

Low Friction Cylinders Series MQ

39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8) 29 5.5 38 4 5 5 8 20 3.5 6.5 14.5 7 16 44 M4 x 0.7 M6 x 1.0 10 to 60 34 8 8 ( 7.8) 36 5.5 47 7 5 7 10 25.5 5.4 9 18 10 20 47.5 M5 x 0.8 M6 x 1.0 10 to 60 37.5 10 10 ( 9.8) 40 5.5 52 7 6 8 10 28 5.4 9 19.5 10 25 10 to 50, 75, 100 54 M6 x 1.0 M6 x 1.0 42 12 12 (11.8) 45 8.5 Rc 1/8 NPT 1/8 G 1/8 49.5 60 7 7 4.5 10 12 34 5.5 9 23 10 30 10

LEC-OM02704CN

10 .2 10.1 .2 10.2 .3 10.3 CC-Link .3 10.4 .4 10.4.1 .4 10.4.2 .5 10.4.3 .14 10.5 .16 10 1 10 10 10.1 MR Configurator 1 LED LED CN6CN2CN3 1. 2.

MQQ

D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x

MQQ

5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5 M6 x 1.0 84.5 12 12 45 13.5 M6 x 1.0 60 4.5 10 12 34 5.5 9 58 10 49.5 7 7 28 10 to 50, 75, 100 116 M8 x 1.25 104 13 16 52 17.5 M6 x 1.0 69 5 14 12 40 5.5 9 71 10 57 10 7 With rod end male thread: MQQDM

JXCx-OMT0023

] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.