MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

HRX-OM-X027

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

Large Size Vacuum Module: Series ZR

80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1-W15S1 Exhaust characteristics

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

5 Port Solenoid Valve Series SV

) Internal pilot operating pressure range MPa (psi) 4 position dual 3 port valve 2 position double 0.1 to 0.7 (14 to 101) 3 position 0.2 to 0.7 (29 to 101) Operating pressure range 100kPa to 0.7 (14.5 to 101) External pilot operating pressure range MPa (psi) 2 position single, double 0.25 to 0.7 (36 to 101) 3 position 10 to 50 (with no freezing) (14 to 122) Ambient and fluid temperature C

Pressure Sensor

kPa 101 kPa For low pressure 0 to 101 kPa 0 101 kPa -10.1 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OME0004-G Dimensions PSE53-M5 PSE53R06 R07 Model No.

Digital Flow Switch (Integrated display type) ( compatible)

After 30 seconds, it will automatically reset to the display selected in [F10]. (Refer to page 53.) (Example shown is for 16 L/min type) : An arbitrary display can be added to the sub display by setting in [F10]. If the sub display is switched during the arbitrary display, the display will return to the arbitrary display 30 seconds later.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

16 165 175 117 140 40 42 12 60 80 42 39 10 22 62 93 10 70 15 85 146 147 1000 (1001 to 1200) 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 170 (179) 0.032 0.059

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500 300 300 500 300 10 15 30 54 4 55 75 23 27 7 5 66 36 82 7 30

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

Multi-channel Digital Sensor Monitor

[F80] Power saving mode completed In power saving mode, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode.

%silltr

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?

SMC Basic Pneumatics

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

JXCx-OMX0009

External Connections . 30 5.1 PWR: Power supply connector . 30 5.2 MOT: Motor connector, ENC: Encoder connector . 30 5.3 SI: Serial I/O Connector . 30 (1) Connecting the teaching box . 30 (2) Connection with a PC . 31 5.4 CC-Link communication connector . 31 6.

CC

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 1/2 57 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 3/4 62 180.5 124.9 135 MVGQ

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

CC

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ

Sensor Monitor

N.C. -14No.PS-OMU0012-C Internal circuit and wiring example Setting of NPN open collector 2 outputs: Pressure sensor 3-wire type Max. 30 V, 20 mA Residual voltage: 1 V or less Setting of PNP open collector 2 outputs: Pressure sensor 3-wire type Max. 20 mA Residual voltage: 1 V or less Setting of NPN open collector 2 outputs: Pressure sensor 2-wire type Max. 30 V, 20 mA Residual voltage: 1