Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stainless steel linear guide (specially treated) 102 CX The specially treated linear guide achieves low particulate generation, high linearity and high precision.

D. P. Lube ALD600/900 Series

The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air 1.5 MPa Proof pressure Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)

Air Pilot Operated Series NVSA

SP 0300 trot Btock 1-lXT01&3Clrt t 4-fNXToa}la.t Hotd Down Bolt. l, 1{ {Or't lt .l DtitEl{stot{s A B c D E 4.01. (102) 2.13 (31) 0.$ (2s) o.17 114 0.31 (8) Mlrntars in Parenthoses Optlonal SPA02O0 Interface apeed control w/crossover pilot holes to connect with sub.olate.

Electro-Pneumatic Regulator IT1000/2000/4000

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62 73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102

E-P HYREG ® Series VY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P2 port M5 Pilot EXH. port Silencer (Option) VY1300 102 03 04 Applicable cable O.D. 4 to 6.5 Connection mark All types are the same in terms of connection.

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

VS 8-2/VS 8-4

or less 36 or less 40 or less 36 or less 40 or less 40 or less 45 or less 50 or less 15 or less 20 or less 70 or less 80 or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

Piping: Base Mounted: Bottom Ported, Stations & Port Location: 10 Stations (Type 40), Port Size: Base Mounted M5X0.8, Thread: -

Piping: Base Mounted: Bottom Ported, Stations & Port Location: 10 Stations (Type 40), A, B Port: Base Mounted M5X0.8

Piping: Base Mounted, Stations & Port Location: 10 Stations (Type 40), Port Size: NPTF1/8

Series: 3 (VFA3000), Stations: 10

Series: 5 (VFA5000), Stations: 10

Manifold Type: Bottom Ported Common EXH, Stations: 10 Stations, Passage: Type 40, Port Size: 1/4, Thread Type: -

Manifold Type: 40 (Bottom Ported Common EXH), Stations: 10 Stations, Passage: 2 (Type 40), Port Size: 02 (1/4)

Series: VFA3000, Stations: 10, Thread: -

Series: VFA5000, Stations: 10, Thread: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9