3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Compact yet provides a large flow capacity Various manifold piping directions V100 Output port: Manifold set-up allowing 360 rotation of 2 (A) entry direction (in 90 increments) Body width 18 mm SY Type 20 and 21 SYJ Available in vacuum applications (101.2 kPa) VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

3 Port Solenoid Valve

To remove the station, follow the same procedure for assembly and disassembly. 21 Series S070/Specific Product Precautions 3 Be sure to read before handling. Refer to pages 16 through 19 for safety instructions, precautions.

VKF300

Port Direct Operated Poppet Solenoid Valve SeriesVKF300 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Series VKF300 Compact with large flow rate Body width 18mm Cv0.25 (Standard: Base mounted type) Cv0.20 (Standard: Body ported type) Various manifold piping directions Output port: Manifold set-up allowing 360 rotation of 2(A) entry direction (in 90 increments) Types 20 and 21

Air Pilot Operated

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

AC Servo Motor Driver (SSCNET Type)

Initial Test Drive .14 6.2.1 Start up the Setup software (MR Configurator2TM) . 15 6.2.2 System Settings . 16 6.2.3 Model Selection . 16 6.2.4 Driver ON LINE Check . 17 6.2.5 Help Function . 17 6.3 Parameter setting (Driver side) .18 6.3.1 Change of parameter block . 19 6.3.2 Reading parameters . 20 6.3.3 Parameter setting method . 20 6.3.4 The recommended parameters for each actuator . 21

EX500-GPR1A.eng

EX9-PE1 21.2 59.8 43.2 80.3 22.2 21 26.7 PWR PWR L dimensions The mounting and removing methods of each SI unit are as shown below.

Air Pilot Operated Series NVSA

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Port Direct Operated Poppet Solenoid Valve SeriesVKF300 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Series VKF300 Compact with large flow rate Body width 18mm Cv0.25 (Standard: Base mounted type) Cv0.20 (Standard: Body ported type) Various manifold piping directions Output port: Manifold set-up allowing 360 rotation of 2(A) entry direction (in 90 increments) Types 20 and 21

CE

7 -X NBR Valve retainer seal #7 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals. 20Data 10-12-21 21 Series CE1 Dimensions: 12, 20 Both ends tapped style: CE1B Bore size Stroke 2-P (Port size) 2-N through 4-O thread depth R Metal connector 500 or 3000 M14 x 1 B + Stroke A + Stroke A B C D E G H I K L M Bore size (mm) 12 20 Standard

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

Manifold Specifications

1 1 1 8 G L M KZ D With attachment plug lead wire: 15 stations max. 1 8 C4 Side Grommet L plug connector M plug connector K plug connector DIN terminal Non plug-in type VV5ZS2-51 2 to 24 stations VZS250C6 Non plug-in type (At 6 stations) (Manifold base) VV5ZS2-51-061-011 (2 position single) VZS2150-5G 5 (3 position exhaust center) VZS2450-5G1 (Individual EXH spacer) VVZS2000-R-01-21

CE

7 -X NBR Valve retainer seal #7 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals. 20Data 10-12-21 21 Series CE1 Dimensions: 12, 20 Both ends tapped style: CE1B Bore size Stroke 2-P (Port size) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

CXWM/CXWL

Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 20 With End Lock: CXWM20Stroke/50 to 200 R 2 x 2-M6 x 1.0 thread depth 8 4-M5 x 0.8 thread through From opposite side 4-7.5 counterbore depth 4.5 2 x 2-6H7 depth 8 +0.012 0 11 depth 21 (An adjusting bolt M10 x 1.0 x 14l to the plate port) 2 positions for set screws for fixing adjusting bolt (M5) MX MTS 2-M5 x 0.8 (Cylinder

LG1H

Nil W High rigidity direct acting guide H Axial F Cable entry direction Series Cable length Without coupling With coupling 20 21 2m 3m 4m 5m 2 3 4 5 Stroke Lead screw lead Motor specification 10mm 20mm A C Standard motor Matsushita Electric Industrial Co., Ltd.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Symbol Order Made P.4.6-21 4.6-15 Micro Mist Separator with Prefilter Series AMH AMH150 to AMH850 How to Order AMH 250 03 J B Body size Options J Drain guide 1/4B female thread R IN/OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Description None Bracket Symbol T Element service indicator B N.C.auto drain C N.O.auto drain D Note) Refer to p.4.7-7

S070

9200-www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21

3 Port Solenoid Valve Series VQ100 1

L dimension 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. 20 260.5 L dimension 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

S070

150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21