3

2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41

RZQ

cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke cylinder RZQ-CDQ2 Additional cylinder tube length RZQA300-150 CDQ2A300D Bore size (mm) CEP1 A CE1 32 591 37 345.5 382.5 40 606 37 355 392 CE2 50 631 41

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 41 + Stroke M2.5 x 0.45 12 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part no.: MT-S8 Rod end nut part no.: NTJ-006A 8

DM

No. of connecting tubes Applicable tubing Accessories (optional) Polyurethane TU0425 Socket side only DM6S-04N DM6S-04NU DM6S-06N DM6S-06NU DM12S-04N DM12S-04NU DM12S-06N DM12S-06NU Nylon T0425 T0403 T0604 Soft nylon TS0425 Plug side only DM6P-04N DM6P-04NU DM6P-06N DM6P-06NU DM12P-04N DM12P-04NU DM12P-06N DM12P-06NU Multiconnector DM6-04N DM6-04NU DM6-06N TU0604 DM6-06NU 6 DM-C-6 TS0604

Output block / Power block

load 11 EX9-OET (Output block for low wattage load) 13 EX9-OEP (Output block for high wattage load) 14 Polarity 15 The number of connected stations 15 Limit of output points when the Output block for high wattage load and Power block are used 16 Supply current 19 Connection of inductive load 28 Mounting and Installation 29 Mounting 29 Installation 29 Wiring 30 LED Indication 40 Maintenance 41

PROFIBUS DP Compatible Fieldbus System

Dimensions 24 SI unit Model indication and How to order 25 Summary of Product parts 26 Mounting and Installation 27 Installation 27 Setting 29 Specification 30 Specifications 30 Dimensions 32 Input Unit Manifold Model indication and How to order 33 Summary of Product parts 34 Mounting and Installation 35 Installation 35 Wiring 35 Setting 39 Specification 40 Specifications 40 Dimensions 41

MLGP

) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 283 314 220 251 157 188 94 126 314 63 OUT 20 10 236 212 189 165 142 118 94 71 47 236 IN 491 393 442 295 344 196 246 98 147 OUT 491 25 12 378 340 302 265 227 189 151

CXT

MGQ Theoretical Force MGG (N) MGC IN OUT Cylinder bore size (mm) Operating pressure (MPa) Operating direction Piston area (mm2) 0.7 0.5 0.3 MGF 84.8 IN 59 42 25 12 113 OUT 79 57 34 CY1 151 IN 106 75 45 16 201 OUT 141 101 60 MY1 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (2) End plate DIN rail clasp When a manifold contains a large number of stations and is difficult to remove all at once, separate the manifold into several sections before removing it. 30 41 1 2 Mounting and Removal of Valves Mounting Manifold on DIN

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

Hand Valve Series VH

25 25 25 4 (B) SlA 1 (P) 3 (R) 1 (P) l74 l62 62 49 VlA 2 (A) 49 4-5.5 4-6.6 SlA VlA 62 134 97 VM/VR 125 94 VH 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc1/4 VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel cut dimension 1 (P) 3 (R) 2-A +0.3 0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41

VQ

Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41

IIIIIII

.75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57 (40) 1.06 (27\ 1.42 (36) 1.26 432) 1.20 '30.51 ) 2 4 (6) Millimelers in Parentheses 1-N015 151

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

3 Port Solenoid Valve Series VQ100

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-3Aq

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-