Vacuum Unit Ejector / Vacuum Pump System

Replacement Parts 41 7.5. Replacement Parts for Manifold/How to Order 41 8. Maintenance 48 8.1. Maintenance 48 8.2. Replacement Procedure 50 9. Specifications 55 10. Port Layout 60 11. Exhaust/Flow Rate Characteristics 70 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 70 11.2. Vacuum Pump System Flow Rate Characteristics 72 11.3.

Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

48

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.The auto switch may be damaged if a screw other than the one supplied is used. 5 68 68 63 How to Order D-M9 N Auto Switch Internal Circuit D-M9N(V) Series Lead wire length Nil M L Z 0.5

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

2/3 Port Valve for Various

46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

Base Mounted Metal Seal/Rubber Seal Series VQ

P (SUP) port 2-C10 C8: One-touch fitting for 8 Dimensions Formula L1 = 16n + 53, L2 = 16n + 68 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L n L1 L2 (L3) (L4) 117 132 162.5 173 133 148 175 185.5 149 164 187.5 198 165 180 212.5 223 85 100 125 135.5 101 116 150 160.5 181 196 225 235.5 197 212 237.5 248 213 228 262.5 273 229 244 275 285.5 245 260 287.5 298 261 276

HRX-OM-W058

REFRIGERANT R410A(HFC) 0.39kg (GWP:2088) The type and quantity of refrigerant (REFRIGERANT) WEIGHT 45kg (Net Weight) HRX-OM-W057 HRX-OM-W058 MANUAL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan G MADE IN JAPAN (It is an example of model "HRS030-A-20-R".)

CXS

Reed switch Resistor Lead wire length: 0.5m 6 6 6 6 8 8 Zener diode Lead wire length: 3m 30 30 30 30 41 41 CD-P11 OUT() Blue [Black] CD-P12 Blue [Black] Contact Protection Box D-A96(V) DC(+) Brown [Red] LED Internal circuits Type D-A9 switches do not have built-in contact protection circuits.

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Guide Cylinder/Compact Type Series MGC

MGJ Front mounting flange MGP MGQ 2 x P (Rc, NPT, G) MGG MGC MGF MGZ R Y + Stroke MGT (mm) R Y P Bore size (mm) 20 25 32 40 50 1/8 14 88 1/8 14 88 1/8 14 90 1/8 15 101 1/4 16 116 D-X Individual -X 395 Series MGC Slide Bearing Allowable End Load and Deflection F Y MGCM 20-R MGCM 25-R MGCM 32-R Stroke Stroke Stroke (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y

Air Slide Table Series MXW

Width across flats 13 Operating port Rc 1/8 (NPT 1/8, G 1/8) 8 x M5 x 0.8 thread depth 13 Note) A Operating direction 6H9 + 0.030 0 depth 5.5 (Insert) 7 (Hexagon socket head taper thread plug) 48 98 72 41 10 8 25 40 40 40 Y Y Operating port Rc 1/8 (NPT 1/8, G 1/8) 41 160 B Operating direction 6H9 + 0.030 0 depth 5.5 (Hexagon socket head taper thread plug) 10.5 Operating direction B A 9.5

Metal Seal/Rubber Seal Series VQ Body Ported

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

ZB-OM00301

Assy Assy Ass y Ass y Assy Assy /PSE /ZISE10 (URL http://www.smcworld.com 41 - No.ZB-OM00301 / UP () 42 - No.ZB-OM00301 ZFAZFBZFC / 10 50 PD PD 43 - No.ZB-OM00301 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2013 SMC Corporation All

ZQ-OM01301

Maintenance 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 41 -

Multistage Ejector (N)ZL Series

Ejector Specifications (N)ZL212 Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range 1.2mm x 2 200l/min (ANR) (7 SCFM) 126l/min (ANR) (44 SCFM) 84kPa (24.9 inHg) 0.7MPa (101 psi) With adaptor 0.2 to 0.5MPa (29 to 72 psi) 0.4MPa (58 psi) 5 to 50C (41 to 122F

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (

Rotary Cylinder Series MRQ

Symbol -X10 4 Long Stroke (101 to 200 mm) Refer to the table of number of the auto switches mounted below.