Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

Base Mounted Metal Seal/Rubber Seal Series VQ

P (SUP) port 2-C10 C8: One-touch fitting for 8 Dimensions Formula L1 = 16n + 53, L2 = 16n + 68 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L n L1 L2 (L3) (L4) 117 132 162.5 173 133 148 175 185.5 149 164 187.5 198 165 180 212.5 223 85 100 125 135.5 101 116 150 160.5 181 196 225 235.5 197 212 237.5 248 213 228 262.5 273 229 244 275 285.5 245 260 287.5 298 261 276

HRX-OM-W058

REFRIGERANT R410A(HFC) 0.39kg (GWP:2088) The type and quantity of refrigerant (REFRIGERANT) WEIGHT 45kg (Net Weight) HRX-OM-W057 HRX-OM-W058 MANUAL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan G MADE IN JAPAN (It is an example of model "HRS030-A-20-R".)

CXS

Reed switch Resistor Lead wire length: 0.5m 6 6 6 6 8 8 Zener diode Lead wire length: 3m 30 30 30 30 41 41 CD-P11 OUT() Blue [Black] CD-P12 Blue [Black] Contact Protection Box D-A96(V) DC(+) Brown [Red] LED Internal circuits Type D-A9 switches do not have built-in contact protection circuits.

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Guide Cylinder/Compact Type Series MGC

MGJ Front mounting flange MGP MGQ 2 x P (Rc, NPT, G) MGG MGC MGF MGZ R Y + Stroke MGT (mm) R Y P Bore size (mm) 20 25 32 40 50 1/8 14 88 1/8 14 88 1/8 14 90 1/8 15 101 1/4 16 116 D-X Individual -X 395 Series MGC Slide Bearing Allowable End Load and Deflection F Y MGCM 20-R MGCM 25-R MGCM 32-R Stroke Stroke Stroke (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y

Air Slide Table Series MXW

Width across flats 13 Operating port Rc 1/8 (NPT 1/8, G 1/8) 8 x M5 x 0.8 thread depth 13 Note) A Operating direction 6H9 + 0.030 0 depth 5.5 (Insert) 7 (Hexagon socket head taper thread plug) 48 98 72 41 10 8 25 40 40 40 Y Y Operating port Rc 1/8 (NPT 1/8, G 1/8) 41 160 B Operating direction 6H9 + 0.030 0 depth 5.5 (Hexagon socket head taper thread plug) 10.5 Operating direction B A 9.5

Metal Seal/Rubber Seal Series VQ Body Ported

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

ZB-OM00301

Assy Assy Ass y Ass y Assy Assy /PSE /ZISE10 (URL http://www.smcworld.com 41 - No.ZB-OM00301 / UP () 42 - No.ZB-OM00301 ZFAZFBZFC / 10 50 PD PD 43 - No.ZB-OM00301 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2013 SMC Corporation All

ZQ-OM01301

Maintenance 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 41 -

Multistage Ejector (N)ZL Series

Ejector Specifications (N)ZL212 Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range 1.2mm x 2 200l/min (ANR) (7 SCFM) 126l/min (ANR) (44 SCFM) 84kPa (24.9 inHg) 0.7MPa (101 psi) With adaptor 0.2 to 0.5MPa (29 to 72 psi) 0.4MPa (58 psi) 5 to 50C (41 to 122F

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (

Rotary Cylinder Series MRQ

Symbol -X10 4 Long Stroke (101 to 200 mm) Refer to the table of number of the auto switches mounted below.

Compact Cylinder

26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41

HRX-OM-Q026

PV SV HRSH Series 5.17 Pump Operation Mode Setting 5-41 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 5.18 Warming Up Function 5.18.1 Warming up function Keep the power supply ON for this function. This function does not operate when the power is OFF.

CG1

Bore size (mm) C d B1 D H1 (15) (19.6) (21.9) (31.2) (37.0) (47.3) 5 6 8 11 13 16 13 17 19 27 32 41 12.5 20 25, 32 40 50, 63 80 100 M8 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 16.5 18 26 31 39 AccessorySCG1 Bore size #11 1.6-11 Series CDG1 Auto Switch Specifications Refer to p.5.3-2 for details of the auto switch.

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 16 20 Y-G02 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 34 8.5 25 M8 x 1.25 10.3 11.5 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 20 I-G02 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 8 20 25 Y-G03 41 10.5 30 M10 x 1.25 12.8 14 20 25 I-G03 10 10 41 10.5 30 M10 x 1.25 12.8 14 10 32, 40 Y-G04 42 16 22 30 M14 x

Electric Actuators

Operating temperature range 41 to 122F (5 to 50C) Operating humidity range [%RH] 90 or less (No condensation) Weight 12.3 oz (350 g) (Except cable) Note) CE-compliance The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.

ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82