Stations: 12 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 5 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 10 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Digital Flow Switch (Integrated display type) ( compatible)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 NC White Not connected 3 LBlue 0 V 4 C/Q Black Communication data (IO-Link)/Switch output 1 (SIO) : When using the lead wire with M8 connector included with the PF3W7 series.

Cylinder with Turntable Series MGT

7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

CRQ2

Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q

Compact Guide Cylinder Series MGQ

(Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF

VXR21/22/23

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

ZR

Refer to pages 13-153 to 13-15-4 for Safety Instructions and Common Precautions and refer to page 13-1-5 for Precautions on every series.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S: Upper space 90, Lower space 180 6 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 TF effective depth TL Sizes 20, 30, 40 TA TB 45 BE CA CA BU 8-JJ (opposite side 4 places) 2-J through (opposite side JA counter bore depth JB) BD B With double shaft DD W D I K Auto switches b (10) Max. 2-Rc1/8 (port size) H F (US) M (UW) CB Q BC N BB BA BA G D A (AU) Max S L TF effective depth

IDU/IDF

Power cord outlet IDU6D to 15C, IDF6D to 15C IDF75C A 240 240 30 30 240 240 65 65 B 40 40 49 49 40 40 40 40 Model IDU6D IDU8D IDU11C IDU15C IDF6D IDF8D IDF11C IDF15C E 225 225 181 Model IDF37C1 IDF55C IDF75C A 425 190 208 B 375 140 158 C 75 75 66 D 153 153 144 Power cord outlet (17) Grommet with waist Back side Cooling water outlet Cooling water inlet A D E Compressed air pressure gauge B

“Going to

* 305* 500 Symbol Roll size 20 33 153 305 500U Size Size 20m 100 ft. 100m 500 ft. 1000 ft. 500m 66 ft. 100 ft. 500 ft. 1000 ft. 1640 ft.

Air Cylinder Series MB

Features 1 Q, MBB MB 32, 40, 50, 63, 80, 100, 125 Direct mounting type auto switches can be fitted. Easy adjustment of cushion valve Adjustment of the cushion valve is made with a hex. wrench allowing for easy fine adjustment. The cushion valve is recessed in the cover.

PF-OMM0004_C

Q PF3W704S 104 50 63.6(Max.68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W704S 56.5 22 PF3W720S 60.5 22 PF3W740S 78 30 -84No.PF-OMM0004-D PF3W704/720/740(+) A AA D K S PF3W704S--T 115 50 81.2 69.5 67.5 PF3W720S--T 123 54 85.2 73.5 71.5 PF3W740S--T 153 71 105.5

PF-OMN0009_C

Q PF3W504S 104 50 63.6(Max. 68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W520S 112 54 63.6(Max. 68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71