Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AC Servo Motor Driver (CC-Link Type)

/Speed command data When setting the servo motor speed in this remote register, always set the acceleration/deceleration time constant in the point table No.1. -123- (8) Selection of forward rotation start (ST1) Device No. Signal name Description Remarks 1 station 2 stations (Device name) occupied occupied Forward rotation start (ST1) 1.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Modular Type Lubricator Series AL

x 4 nylon tubing Name plate and caution plate for bowl in imperial units (PSI, F) Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02

3 Way Direct Acting NVKF 300 Series

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

Series AP3100

type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating pressure Knob Cv 0.7 1.3 1.0 1.0 1.0 Option (AP3150 only) Ports 2 ports Code 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5/B64 D-G5/K59 D-G5W/K59W (A set of band and screw) BA-02 BA-01 (A set of band and screw) BA-32 (A set of band and screw) BA-04 (A set of band and screw) BA-05 (A set of band and screw) BA-06 (A set of band and screw) BA-08 (A set of band and screw) BA-10 (A set of band and screw) Note) Since the switch bracket (made from nylon) are affected in an environment where alcohol, chloroform,

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 1417 A VK300 Series Specific Product Precautions Be sure to read this before handling the products.

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Stations: 2 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 7 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 20 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 5 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 3 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 3 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 5 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 6 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)