Stations: 2 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 6 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: None, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 2 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 11 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 5 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 7 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 8 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 4 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: A (Mounting Adaptor)

Stations: 2 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: Rc (PT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

70.0 10.0 IN -XC22 Fluoro rubber seals 353 212 177 141 106 70.6 247 35.3 OUT CXS15 8 -X593 Without plate 252 151 126 101 75.6 50.4 176 25.2 IN 628 377 314 251 188 126 440 62.8 OUT CXS20 10 471 283 236 188 141 94.2 330 47.1 IN 982 589 491 393 295 196 687 98.2 OUT CXS25 12 756 454 378 302 227 151 529 75.6 IN 1608 965 804 643 482 322 1126 161 OUT CXS32 16 1206 724 603 482 362 241 844 121

ZSM1-115/121

Vacuum Switch Diaphragm Style Series ZSM1-115/121 Specifications ZSE ISE PSE ZSM1-115 ZSM1-121 Model Solid state Contact (Reed switch) Switch specifications Z I SE3 Air/Inert gas Fluid 0.5 MPa Max. operating pressure PS 27 to 80 kPa Regulating pressure range Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

CHKD/CHKG

14 70 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 83.5 20 depth 13 140 16 77 35.5 146 30 33 33 M27 x 3 9 13 52 30 121 102 23 depth 15.2 161 18 88 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 123.5 26 depth 17.5 189 22 106 56 208 50 43 45 M39 x 4 21 17 76 40 174 149 Note 1) Body dimensions are the same with or without auto switches.

CV/MVGQ

112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CV/MVGQ

112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CXWM/CXWL

Theoretical Output (N) Operating pressure (MPa) Piston area (mm 2) Model Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 CXWM106 101 20 30 40 51 61 71 81 91 CXWM1610 245 49 74 98 123 147 172 196 221 CXWM2012 402 80 121 161 201 241 281 322 362 CXWM2514 597 119 179 239 299 358 418 478 537 CXWM32Made to Order Specifications (For details, refer to page 8-31-1.) 20 980 196 294 392 490 588 686 784