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Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. Mounting Caution Caution ZK2 1.

This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.) Note: If the pressure switch allows an error of 1 [% F.S.], the output turns ON at 51 [kPa]. Taking the repeatability into account, the output turns ON at 50 to 52 [kPa] and, in the same way, the pressure display turns 50 [kPa] at 49 to 51 [kPa]. (Refer to the chart below.)

However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600mm stroke, specify "-XB11" at the end of the model number. Refer to the Made to Order Specifications on page 33. Made to Order Specifications Refer to pages 33 through 35 for details.

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Adjusting width Adjusting width with angle adjusting screw A (90 at max) with angle adjusting screw B (90 at max) Rotation range of key groove 11-7-51

Circumference divided in 6 equivalants (mm) E (g6) F (h9) M L K D G C B A Model A port B port CDRB2BWU10-S 4 9 10 0.5 9 14 3 45.5 15 29 CDRB2BWU15-S 5 12 15 0.5 10 18 4 47 20 34 CDRB2BWU15-D CDRB2BWU20-S 6 14 20 0.5 10 20 4.5 51 29 42 Rotary actuator CDRB2BWU20-D CDRB2BWU30-S A port B port 8 16 30 1 12 22 5 55.5 40 50 CDRB2BWU30-D Angle adjuster (34.5: Connector type) R Y P Model N Q 90 100

Circumference divided in 6 equivalants (mm) E (g6) F (h9) M L K D G C B A Model A port B port CDRB2BWU10-S 4 9 10 0.5 9 14 3 45.5 15 29 CDRB2BWU15-S 5 12 15 0.5 10 18 4 47 20 34 CDRB2BWU15-D CDRB2BWU20-S 6 14 20 0.5 10 20 4.5 51 29 42 Rotary actuator CDRB2BWU20-D CDRB2BWU30-S A port B port 8 16 30 1 12 22 5 55.5 40 50 CDRB2BWU30-D Angle adjuster (34.5: Connector type) R Y P Model N Q 90 100

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

SI . 49 10.1. . 49 10.2. . 51 10.3. . 53 10.4. I/O . 53 10.5. I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11. EX245-DX1 . 70 11.1. . 70 11.2. . 71 11.3. . 72 11.4. . 72 11.5. LED . 73 11.6. . 74 12. EX245-DY1 . 75 12.1. . 75 12.2. . 76 12.3. . 77 12.4. . 77 12.5.

Gateway unit and its peripheral devices /Specific product precautions 51 15.1 Design and selection .51 15.2 Handling.51 15.3 Mounting.52 15.4 Electrical wiring .53 15.5 Power supply.53 15.6. Grounding.53 15.7 Maintenace.54 3 - LEC Series/ Gateway unit 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

3/4, 1 AR60K-D 1/8 95 155 45 50 50 42.5 87.5 42.5 87.5 42.5 87.5 28 51 1 Optional specifications Digital pressure switch Bracket mount Panel mount Model J Q R U AR20K-D 27.8 37.5 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30K-D 27.8 43 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40K-D 27.8 52 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40K-06-D 27.8 52 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21

[gal]/min) Facility water minimum necessary flow rate L/min 10 15 25 40 (2.6 [gal]/min) (4.0 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Ethylene glycol solution60% 0.35 / 0.55 0.45 / 0.65 0.40 / 0.60 0.35 / 0.55 (At 4L/min) (At 15L/min) (At 30L/min) (At 40L/min) Pump capacity (50Hz/60Hz) *3 MPa (51

MI32: Arrangement range 20 mm Stroke adjuster (Rear end stroke only) MQQ M RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 MI W S 26 17 IN 60 51

Explosion Proof Equipment 5 Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve Series 51-SY Explosion Proof Solenoid Valve Series 50-VFE/VPE Series 51-SY Series 50-VFE/VPE Consult SMC about Material restriction.

51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

193 30 17 62 73 215 40 51 196 35 17 62 73 218 50 62 221 (230) 35 17 70 82 241 (250) Note) Dimensions inside ( ) are for long strokes.

Stroke range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol Example CY1F10R237ALA93XB10 Symbol 2 Long stroke -XB11 Available with long strokes exceeding the standard strokes. The stroke can be set in 1mm increments.

Gripper Series MHY2 MHY2-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 +0.030 0 4H9 Depth 4 2-M4 X 0.7 2-M5 X 0.8, 10 deep (Thread for mounting attachment) 8 10 0.005 0.025 (Mounting thread) 5 9 2-5.5 (Mounting hole) 2-M5 X 0.8 Depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 MHZ2 21H9 Depth 1.5 +0.052 0 Postioning pin hole 51

on all faces (5 surfaces including end surface) Finger options MI12: Arrangement range 6mm MI20: Arrangement range 12mm Can be mounted on standard products Stroke adjuster (Rear end stroke only) Scraper Theoretical Outputs Operating pressure MPa Unit: N Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 34 23 OUT 45 57 68 79 113 12 6 26 17 IN 34 43 51