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When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by l (liter). 1 dm3 = 1 l 16 Solenoid Valve Flow Characteristics C : Sonic conductance [dm3/(sbar)

B B B B B B B B B + IN + + +++A IN A NI NI B B O T U O T U 2 4 To CYL port To CYL port P.930 P.931 P.932 P.941 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

F D D Approx. 300 Q F G1/2 Width across flats H Width across flats H C E C E R R B A 2 x P Port size 2 x P Port size B A M M 2 x J thread depth K 2 x J thread depth K DIN terminal: D Conduit terminal: T S Q F 34 D Cable 6 to 12 (Q) F G1/2 D 25 Width across flats H Width across flats H T C M C R R E E (S) A 2 x P Port size A 2 x P Port size B B M 2 x J thread depth K G1/2 2 x J thread depth

HNBR/NBR Screws for assembly Steel 12 ZL1 Series How to Order Replacement Parts z How to Order Supply Valve/Release Valve How to Order Lead Wire with Connector Assembly for Supply Valve/Release Valve 1 M Q Z SYJ5 4 5 SY100 30 4 A 6 q w e r t y q w q Type of actuation q Power supply voltage w Lead wire length 1 Normally closed 2 Normally open (Supply valve only) 1 100 VAC 2 200 VAC 3 Other

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

(Unit 1) Byte 3 Diagnostic data byte3 Byte 3 Output 16 to 23 Byte 4 Byte 4 Output 24 to 31 Byte 5 Byte 5 Padding data Total 4 bytes Total 6 bytes -82No.EX-OMZ0024 Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 AXA DY#B DY#B DX#B DX#D SEN7 Analogue input Digital output Digital output Digita input Digital input SI unit End plate Valve 4 byte 1 byte 2 byte Input Input Input 1 byte 1

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI units are also allowed to be described by L (liter). 1 dm3 = 1 L 8 VXB Series C : Sonic conductance [dm3/(sbar)] b : Critical pressure

A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 091 130 182 Note) A set of side supports consists of a left support and a right support.

P2 + 0.1 When b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t P2 + 0.1 When > b, subsonic flow P1 + 0.1 P2 + 0.1 2 b P1 + 0.1 293 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 273 + t Q: Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are allowed to be described by L (liter). 1 dm3 = 1 L 8 Series VXB C : Sonic conductance [dm3/(sbar)] b : Critical pressure ratio [] P1

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

flats H E E A B 2-P 2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.