SMC Corporation of America
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r Stations Lt Electrical entry D-sub cotr/],eclot kil t25P) \ryilhout cabJe 1 lo 12 (24) D-sub connector kil (25P) wiltr 1.5m cable D-sub connector kil (25P) with 3.0m cable D-sub connector kil (25P) with 5.0m cable Flal ribbon cable kt (26P) withoulcable The mat mlm nlmberol slations drrb|s depend n-g on the eechcal Nole)Leave the box btankior the St Lrnl CO\r wihout input block (SD0) (5

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

O e b u t ) h c n i ( . n i M e l o h . a i d e z i S d . o N t r a P D L 1 A M . t W ) f g ( 8 / 3 1 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 9 7 . 0 ) 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 0 2 4 / 1 2 / 1 3 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 1 7 . 0 ) 8 1 ( 1 9 . 0 ) 3 2 ( 8 2 4 / 1 2 / 1 3 1 1 1 R R K 2 8 . 0 ) 8 . 0 2 ( 3 8 . 1 ) 5 . 6 4 ( 9 8 . 0 ) 5 . 2 2 ( 4 9 . 0 )

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Brass 1 Electroless nickel plated Body NBR, Aluminum alloy 2 Valve Stainless steel 3 Spring Free flow Fitting Male thread Brass 4 Electroless nickel plated Spacer Stainless steel 5 Stopper NBR 6 O-ring 7 Cassette NBR 8 Seal Stainless steel + NBR 9 Gasket Bushing Type: AKB Auto Switch D-B7/B8 D-G7/K7 R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 Free flow Female thread Male thread Description

E G J M N Q R S T U V B AFF20-D/AM20-D/AMD20-D 1/8, 1/4 40 142.3 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5

MB1 D-G5/K5/G5W/G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7/C8, D-C73C/C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-B5/B6/B59W 20 to 100 D-H7/H7W D-H7NF/H7BA/D-H7C 20 to 63 Hs Hs 24.5 16 B A A B Auto Switch Mounting Height (mm) D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-G5NT D-G59F D-H7C D-G5BA D-C73C D-C80C

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 (0.6) Note) 20 (0.80) Note) 10 (0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

-02 25 106 17 62 12 19 DY12-03 17 28.5 26 112 DY12-04 27 17 Reference dimensions after R(PT) thread installation.

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.