SMC Corporation of America
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Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Brass 1 Electroless nickel plated Body NBR, Aluminum alloy 2 Valve Stainless steel 3 Spring Free flow Fitting Male thread Brass 4 Electroless nickel plated Spacer Stainless steel 5 Stopper NBR 6 O-ring 7 Cassette NBR 8 Seal Stainless steel + NBR 9 Gasket Bushing Type: AKB Auto Switch D-B7/B8 D-G7/K7 R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 Free flow Female thread Male thread Description

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

r Stations Lt Electrical entry D-sub cotr/],eclot kil t25P) \ryilhout cabJe 1 lo 12 (24) D-sub connector kil (25P) wiltr 1.5m cable D-sub connector kil (25P) with 3.0m cable D-sub connector kil (25P) with 5.0m cable Flal ribbon cable kt (26P) withoulcable The mat mlm nlmberol slations drrb|s depend n-g on the eechcal Nole)Leave the box btankior the St Lrnl CO\r wihout input block (SD0) (5

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

O e b u t ) h c n i ( . n i M e l o h . a i d e z i S d . o N t r a P D L 1 A M . t W ) f g ( 8 / 3 1 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 9 7 . 0 ) 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 0 2 4 / 1 2 / 1 3 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 1 7 . 0 ) 8 1 ( 1 9 . 0 ) 3 2 ( 8 2 4 / 1 2 / 1 3 1 1 1 R R K 2 8 . 0 ) 8 . 0 2 ( 3 8 . 1 ) 5 . 6 4 ( 9 8 . 0 ) 5 . 2 2 ( 4 9 . 0 )

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Brass 1 Electroless nickel plated Body NBR, Aluminum alloy 2 Valve Stainless steel 3 Spring Free flow Fitting Male thread Brass 4 Electroless nickel plated Spacer Stainless steel 5 Stopper NBR 6 O-ring 7 Cassette NBR 8 Seal Stainless steel + NBR 9 Gasket Bushing Type: AKB Auto Switch D-B7/B8 D-G7/K7 R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 Free flow Female thread Male thread Description

MB1 D-G5/K5/G5W/G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7/C8, D-C73C/C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-B5/B6/B59W 20 to 100 D-H7/H7W D-H7NF/H7BA/D-H7C 20 to 63 Hs Hs 24.5 16 B A A B Auto Switch Mounting Height (mm) D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-G5NT D-G59F D-H7C D-G5BA D-C73C D-C80C

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 (0.6) Note) 20 (0.80) Note) 10 (0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.