Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

width across flats) AS-D AS-T ASP ASN AQ ASV AK Metric Size Inch Size VCHC Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

2/3 Port Valve for Various

Series VXP21/22/23 Dimensions Normally Closed: VXP2270/2380/2390 Normally Open: VXP2272/2382/2392 Grommet: G Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 60 62 62 Applicable N Q L K J B C H F E D A flange M N 25.5 28 28 M 84 (94) 95(105) 106(117) N 41.5 44.5 44.5 M 84 (94) 95(105) 106(117) M 84 (94) 95

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Table of Contents

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

Air Cylinder Series CM2

D C H B Clevis Pin (For CLM2E) (mm) Applicable bore size 20 25, 32 40 D d H B C Part no. SN-020B SN-032B SN-040B Material: Carbon steel 8 26 M20 x 1.5 30 25.5 d D 8 32 M26 x 1.5 37 31.5 10 41 M32 x 2.0 47.3 40.5 l m m t t L Trunnion Nut (mm) Part no. Applicable retaining ring part no.

Compact Vacuum Unit

plug connector With lead wire Note 5) M 0 Without exhaust port 3 For manifold M-type plug connector Without connector Note 5) Silencer exhaust (Individual exhaust) MO No distinction Exhaust direction 1 Note 4) All with light and surge suppressor.

HRX-OM-R026

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

NCM

Note 3) Lead wire tolerance 61 D-H7BAL(Example) 3 m 1 m Flexible specification 5 m Z Lead wires with connector indication Part No. of Lead Wires with Connectors Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m Model Lead wire length 0.5 m (Applicable for connector type only) 90 mm D-LC05 3 m 150 mm D-LC30 5 m 3 m D-LC50 5 m Contact Protection Boxes: CD-P11, CD-P12

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L: L plug connector with lead wire LO: L plug terminal without lead wire M: M plug connector with lead wire MO: M plug terminal without lead wire 5 5 (R1) 1 (P) 3 (R2) Except VQZ1000 and metal seal style.

Table of Contents

Inlet pressure 0.5 MPa Total stroke time (t) (1) Piping length SV1000: 1 m, SV2000/3000: 2 m, SV4000: 3 m Stroke (L) Speed d% d% Stroke (mm) Speed at the end Cylinder direction Vertical upward Stroke Speed controller Meter-out, Directly connected to cylinder, Needle fully open (2) Load ratio {(Load weight x 9.8) Theoretical output} x 100% Speed at the end (u) Time (s) SOL: ON(OFF) 1-2-6

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Vacuum Unit

Flat Ribbon Cable Connector Assembly (Option) Cable length (L) Assembly part number 26P 1.5 m AXT100-FC26-1 3 m AXT100-FC26-2 5 m AXT100-FC26-3 55 Socket side 1425 Terminal no. * For other commercial connectors, use a 26-pin type with strain relief conforming to MIL-C-83503. * Cannot be used for movable wiring 113 47.04 Connector manufacturers example D-sub Connector Cable Assembly (Option

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS-T 2 x Port size ASP ASN AQ ASV 2 x D AK Dimensions Max.

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.