Size: 3 (300), Piping and Mounting: 1 (Side Ported Panel Mount), No.of Positions: 2 (2 Position), Thread: N (NPT), Port Size: 02 (1/4)

Size: 3 (300), Piping and Mounting: 1 (Side Ported Panel Mount), No.of Positions: 2 (2 Position), Thread: N (NPT), Port Size: 03 (3/8)

Size: 3 (300), Piping and Mounting: 1 (Side Ported Panel Mount), No.of Positions: 2 (2 Position), Thread: Rc(PT), Port Size: 02 (1/4)

Size: 3 (300), Piping and Mounting: 1 (Side Ported Panel Mount), No.of Positions: 2 (2 Position), Thread: F [G(PF)], Port Size: 03 (3/8)

Size: 3 (300), Piping and Mounting: 1 (Side Ported Panel Mount), No.of Positions: 2 (2 Position), Thread: F [G(PF)], Port Size: 02 (1/4)

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: -, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 23.06, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: Rc (R), Plumbing Thread Nominal: 1/4, Mounting Method: Panel Mount, Plumbing Type & Direction:

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: -, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 23.06, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: G, Plumbing Thread Nominal: 1/4, Mounting Method: Panel Mount, Plumbing Type & Direction: Direct

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: -, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 27.67, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: G, Plumbing Thread Nominal: 3/8, Mounting Method: Panel Mount, Plumbing Type & Direction: Direct

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: -, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 23.06, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: NPT, Plumbing Thread Nominal: 1/4, Mounting Method: Panel Mount, Plumbing Type & Direction: Direct

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: -, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 27.67, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: NPT, Plumbing Thread Nominal: 3/8, Mounting Method: Panel Mount, Plumbing Type & Direction: Direct

Speed Controller with

SMC CORPORATION Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 1st printing OW printing OW 00 Printed in Spain

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

PA3000/5000/PAX1000

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5