Booster Regulator Series VBA1110 to 4200 1

2 VBAT10-Y-2 Accessorys part no.

Clean Regulator/Fluororesin Type

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Meanwhile, the clean compressed air in housing w passes through flow hole A of body q , it is reduced to a specified pressure by the pressure reducing valve, and is discharged from the OUT. !1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y Auto-drain type w ITVX !

155

w e r t y u i o !

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

q q PA PA PA e e e A B A B A B A B A B t y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

Filter Regulator

-D 3/4 75 149.1 93 40.5 38.4 M421.5 80 0 28 41.5 27.8 52 AW60-D 3/4, 1 95 234.1 155 50 38.4 M621.5 30 0 28 51 27.8 61.5 Optional specifications Semi-standard specifications Metal bowl with PC/ PA bowl Metal bowl With auto level gauge Model Bracket mount Panel mount With barb With drain With drain With drain With drain With drain drain f itting guide cock guide cock guide Q R U V W Y Z

45

32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" (Gasket y is included.)

45

32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" (Gasket y is included.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Y v (1) (1.0W) (3) VQZ1000 VQZ1000-S-01 01 [Rc1/8] 02 [Rc1/4] 02 [Rc1/4] 03 [Rc3/8] L Latching v v (1) Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically. Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical entry: L/ M plug connector only.

ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Clean Room Rodless Cylinder Series CYP ø15, ø32

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

CV/MVGQ

A1 E1 L1 MM NZ RR1 U1 ND L NX Y-04C 3 x 18l 16 + 0.3 + 0.1 22 24 55 M14 x 1.5 13 25 55.5 Polished round 12 38 12 Y-05C 50, 63 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 27 55.5 Polished round 12 38 12 Knuckle Pin, Clevis Pin Y-08C 80 4 x 25l 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 28 76.5 Polished round 18 55 18 Y-10C 100 4 x 30l 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 38 83 Polished round 20

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

VFM300

Component Parts q Description No.

VFM300

Description Material POM Urethane rubber Note ZDC ADC Material Note No. q w e r t y u i o !0 !1 Description Plunger Cushion for end cover Pilot body Body Metallic plated Metallic plated Black zinc chromated !2 !3 !4 !5 !6 !7 !8 !