Compact and Lightweight

12 One-touch Screw-in One-touch 03 04 04 Screw-in Screw-in Screw-in ZH20DA11 13 13 One-touch One-touch One-touch 11 N04 13 One-touch Screw-in One-touch N03 N04 N04 Screw-in Screw-in Screw-in 4 Screw-in: NPT female threads 3 Screw-in: Rc female threads 223 ZH Series L-Bracket / DIN Rail Mounting Bracket When using the ejectors with a clamp mount, order parts q, w and e below separately

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

HRX-OM-W038

Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts. Status (3): The circulating fluid temperature exceeds the threshold of "AS.06", but the alarm will not be generated as it has returned within the 600 sec range of the "AS.23: Range over detecting timer".

HRX-OM-O021

Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts. Status (3): The circulating fluid temperature exceeds the threshold of "AS.06", but the alarm will not be generated as it has returned within the 600 sec range of the "AS.23: Range over detecting timer".

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Micro-Mist Separator with Prefilter Series AMH

V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04 Q) a. 0.3MPa 0.5MPa 0.7MPa ~ VMax.ftOWline-r<~ ~ V 80.02 Max.fIow line 0.3MPa 80.02 ---::'.'_. .. <:. --"i,, _ , .. " ... .::;::.. , 0 3000 6000 9000 12000 15000 Air flow rate Qlmin (ANR) rr ---:--~!'--.. -. .,.. -_---0.7MPa .:':: .,.' ..".'

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Series SYJ3000. q SS5YJ3-20, SS5YJ3-21P The 3 port valve can be used by simply sealing off the unused R port with rubber plug VJ3000-331.

Applicable Auto Switch Model

Cylinder series Bore size (mm) 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BT -04 BT -04 BT -06 BT -08 BT -08 CDVS, CDLA, CE2, CNA CDL1 BT -12 BT -12 BT -16 BT -18A BT -20 CDS1 MDB/MDBB BT03 BT03 BT05 BT05 BT06 BT06 Part No. of auto switch mounting bracket (including bracket and screw) Cylinder series Bore size (mm) BBA1: For D-A5/A6/F5/J5 D-F5BAL is mounted on the cylinder with

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

Table of Contents

Bore size (mm) 4, 6, 8, 10 Port size M3 x 0.5 6 8 or more Stroke (mm) AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

AMR3000 to 6000

06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

CC

RS Q G Valve A If the converter is positioned lower than the cylinder: RS H A Drain port (Piping port) After filling with oil as described in step 4 above, close the oil filler plug. Then, introduce air pressure of approximately 0.05 MPa into the converters air port to push the oil into the cylinder.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !