New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

Modular F.R.L. Unit

for maintenance A G G H M AW30, 40 Panel fitting dimension D Y T J N W Bracket (option) U IN OUT S Z B C Q Plate thickness AW30: Max. 3.5 AW40: 5 P V IN OUT K Pressure gauge (option) OUT Pressure gauge port size Square embedded type pressure gauge (option) Port size E Drain Min. clearance for maintenance A AW10, AW20 AW30, AW40, AW40-06 Applicable model Drain cock with barb fitting With

100

7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

90

q 1 unit q w Set value can be copied up to 10 units.

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) q Bonnet assembly (Maintenance parts)1 Indicator (Option) (Including w, e, y, u, i, o) Port 1(P) (Pressure port) Magnet (Option) Pilot port !

VM

POM Stainless steel Material Note No. y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min) max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Electric Grippers

0 w t q Step Motor (Servo/24 VDC) r u y o i Component Parts No.

Air Cylinder

CS2 D-X Technical Data 207 CM2 Series Construction Spring return t y !1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

4 y e !1 !2 @3 @1 q !4y e !1 !2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Dual Rod Cylinder Series CXSJ/CXS

5 y!6 @3@0 @1r w !3 !0!9ut !4 !7 !1 !2 e !8 q @4 @2 @5 CXSM10 CXSM15 !7 !5 @6 @1 r w !3 i !0 !9 u t !6 !7 !5 @6@0@1r w !3i!0!9u t!6 !4 y e !1 !2 @0 !8 q !4y e !1 !2 q !8 CXSM20 to 32 !7 !5 !6 @0 @1rw o i !0 u !9 t !4 y e !1 !2 q !

7.5

0 y t r q e u q !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2B60 [N.O. valve x 2] SJ2B60 [N.O. valve x 2] SJ2B60K with back pressure check valve !0 y t r w e u w !2 i !