Thread type Rc G NPT Nil F N Voltage 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Series Symbol Port size Consult P/A regarding other voltages. 300 200 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size N.O. Orifice size mm N.C.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
(Pitch) 5 Manual override 5 G: 300 H: 600 (Lead wire length) 9 R R 21.5 15.6 28 (For DC) 34.5 (For AC) 10 25 P P + + + + + 4-M5 x 0.8 (P/R port) 2-3.5 (Mounting hole) G, H: 30.1 G, H: 30.8 (For DC) L2 3 L1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 31.8
(Pitch) 5 Manual override 5 G: 300 H: 600 (Lead wire length) 9 R R 21.5 15.6 28 (For DC) 34.5 (For AC) 10 25 P P + + + + + 4-M5 x 0.8 (P/R port) 2-3.5 (Mounting hole) G, H: 30.1 G, H: 30.8 (For DC) L2 3 L1 31.8 (For AC) (Light/Surge voltage suppressor) (Station 1) (Station n) (Station 1) (Station n) A A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port)
x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator light Most sensitive position Most sensitive position 9
MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.
MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.
x 0.8 Front cylinder port VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port
x 0.8 Front cylinder port VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port
Note 2) For bore size 20 and 25, M5 x 0.8 is only available. Rc, NPT, G port are available for bore size 32 or greater.
Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8
MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15 M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50,
Applied unit Contents 8 GR-S-005 (5 g) MXP8-PS 10 GR-S-010 (10 g) MXP10-PS Guide unit 2 pieces of no. !8 and !
01 02 Closed center VFS2310-G-01 02, Exhaust center VFS2410-G-01 02, Pressure center VFS2510-G-01 02 3 x Rc , 1 8 1 4 150.5 (3 position: 158) 2 x 5 mounting hole 1(P), 2(B), 4(A) bottom ported 2 x Rc 1 8 Manual override (Non-locking) 3(R2), 5(R1) bottom ported 300 (Lead wire length) Bottom ported Pilot EXH port M5 x 0.8 (External pilot port M5 x 0.8) 1 8 ( ): Rc Grommet terminal: Double VFS2210
D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is the
D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is the
Symbol 10 20 25 30 40 50 60 Body size Description Nil K Note 1) Without backflow function With backflow function With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) a Without mounting option With bracket With set nut (for panel fitting) Mounting H + Nil E Without pressure gauge Square embedded type
D G D SI unit SI unit Master unit D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V L2 L1 G Power supply 24V 0V LINE1 LINE2 SHIELD L1 L2 0V 24V Transmission lines SHIELD SHIELD L1 L2 FG 24V 0V L1 L2 FG 24V 0V Black White Brown Blue Terminal resistor Main transmission line Transmission lines Crimped connector SL-J1A Power supply 24V 0V Class 3 ground Class 3 ground 0V 24V G D G D Power supply 24V