3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

3 !2 !1 !0 q t r i S u y o !4 !8 !

PF2A/PF2W

min 1.7 to 17.0 l/min 2 to 16 l/min 0.1 l/min 0.1 l/pulse 3% F .S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100 l/min 1 l/min 1 l/pulse IF Data 5% F .S. or less 3% F .S. or less 5% F .S. or less (0 to 50C, based on 25C) 70 mA or

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

ASR

3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

RB/RBL/RBQ

RB2725 S (Stroke) RHC Model 96 115 115 134 210 229 287 478 5 6 6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.

MXH Series Compact Slide

Q Q Q Q Q Q Q Q Q Q Q Q Q Q MXH Series 6, 10, 16, 20 The use of a recirculating linear guide produces a slide table with excellent rigidity, linearity and non-rotating accuracy.

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

Bag Filter

Material FGFC3-40 Carbon steel F-86S FN AL-79S AL-80S FGF3-40 FGFR3-40 FGFC3-40 159 115 3 10(4B) F-90S F-86S V#6500 210 175 115.4 19 18 FGF5-60 FGFS3-40 FGFR3-40 220 167 3 Stainless steel F-87S AL-79S AI-17S EB ES FGFL3-40 FGFS3-40 Note) 2 pieces are required per filter unit.

3 Position Cylinder Series RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

JA/JAH/JB/JS

100 RHC M48 x 1.5 71000 55000 55000 3 100 Option/Thread nominal size MK(2) JAH63-24-200 JAH80-30-200 JAH100-42-300 63 M24 x 2 2 28000 22000 22000 RS Q G 5 80 M30 x 2 2.5 54000 36000 36000 100 M42 x 3 3 71000 55000 55000 RS H A Series JAH How to Order RZQ JA H X11 40 F 16-150 MI W S CEP1 Heavy load type Series JAHL (Foot style) Option CE1 Mounting style X11 High temperature specifications

JA/JAH/JB/JS

100 RHC M48 x 1.5 71000 55000 55000 3 100 Option/Thread nominal size MK(2) JAH63-24-200 JAH80-30-200 JAH100-42-300 63 M24 x 2 28000 22000 22000 2 RS Q G 5 80 M30 x 2 54000 36000 36000 2.5 100 M42 x 3 71000 55000 55000 3 RS H A Series JAH How to Order RZQ JA H X11 40 F 16-150 MI W S CEP1 Heavy load type Series JAHL (Foot style) Option CE1 Mounting style X11 High temperature specifications

Rotary Actuator

3 @8 @7 @5 @4 e t !4 !1 i !0 !2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Micro-Mist Separator with Prefilter Series AMH

-f'''---c-l---l-l ~ /~/ VI Q) a. 0.3MPa_0.5MPs_ ~ 80021-W'--+---+---+0.3MP.~-1__1 ~ Max.fIowline ---o.7MPa 8 0.02 Max.fIow line ~~_-0.5M!,a -I _:---..

MHF2

M(Maximum allowable moment)(Nm) Allowable load F(N) = L x 10-3 0.68 Allowable load F = 30 x 10-3 = 22.7 (N) (Unit converted invariable number) Load f = 10 (N) 22.7 (N) Therefore, it can be used. 4 Low Profile Air Gripper Series MHF2 How to Order MHF 2 12 F9B D Number of auto switches Number of fingers 2 2 finger Nil S 2 pcs. 1 pc.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MY1

Load weight (kg) Caution The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m m m Moment (Nm) M = F x L F3 M = F x L M = F x L F F2 L2 L1 L3 Maximum load weight Select the load weight from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes exceed even the operating limits shown in the graphs.