Table of Contents 2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
) Width across flat 10 (Hexagon) P Q Q P 5 5 S S 31 8 31 (39) (39) 14.9 14.9 R R 6 6 M5 x 0.8 M5 x 0.8 8 Y Y C A A a a C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R3507W--B5 ZP2-R4010W--B5 ZP2-R5010W--B5 ZP2-R6010W--B5 ZP2-R4020W--B5 ZP2-R5020W--B5 ZP2-R6020W--B5 ZP2-R8020W--B5 2 x 1.5 0.5 0.5 10 11 2.5
Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable
3 y r r y B port A port B port A port B port A port B port A port (Output shaft) (Output shaft) (Output shaft) (Output shaft) e u e e e i Parallel key for size 40 !8 u !2 !9 i @0 !9 !6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.
DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.
DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.
DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.
stroke MA A K F GA 2-Rc P GB H + Q + l R J MM RR TDe9 D E e Width across flats G Air release TT C Air release Air release l 10 f NA T B TX TY 0.3 TY 0.3 NB SS + Q + l + Stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Bore size (mm) Stroke range (mm) l e RR J B C F GA GB M NA NB P R S T SS TD TT TX TY TZ f Q B-rod C-rod B-rod C-rod 321 M10 x 1.25 52 58 38 16 32
5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !
When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T Glossary of Terms Specific Product Precautions 54 JSX/JSXm Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI units = L (liter) b : Critical pressure
) Width across flat 10 (Hexagon) P Q Q P 5 5 S S 31 8 31 (39) (39) 14.9 14.9 R R 6 6 M5 x 0.8 M5 x 0.8 8 Y Y C A A a a C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R3507W--B5 ZP2-R4010W--B5 ZP2-R5010W--B5 ZP2-R6010W--B5 ZP2-R4020W--B5 ZP2-R5020W--B5 ZP2-R6020W--B5 ZP2-R8020W--B5 2 x 1.5 0.5 0.5 10 11 2.5
2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation
7 q @0 u A A i o !9 !6 !9 !1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.
size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.
Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.
0 o 102 0.2 2-1 132 q 134 O-ring Part No.
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
J I Pilot port 2 x M5 x 0.8 7.5 +0.030 0 5H9 ( ) depth 2 37 7.3 (Maximum screw-in depth) 5.5 32.2 3.3 (Minimum screw-in depth) +0.030 0 5H9 ( ) depth 2 B 24 31 62 3 33 50 B N x M5 x 0.812 F 25 2 x M4 x 0.7 thread depth 6 N 2 1 x F Cross-sectional view B-B 21 M 0.5 ZZ Z J I 7.5 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) H G GB HB +0.030 0 +0.030 0 5H9 ( ) depth 3 2 x 5H9 ( ) depth
VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P