RHC ) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500 24.5 = 0.7 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 1000 1500 2000 2500 3000 500 1000 1500
3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.
Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.
[K] (20 [C]) Circulating fluid return temperature T2 : 297 [K] (24 [C]) Circulating fluid temperature difference iT : 4 [K] (= T2 T1) Conversion factor: minutes to seconds (SI units) : 60 [s/min] Heat generation amount by users equipment Q : Unknown [cal/h] [W] Circulating fluid : Tap water*1 Circulating fluid weight flow rate qm : (= x qv x 60) [kgf/h] Circulating fluid weight volume
polyurethane tubing Barb fitting U4 For 4 soft tubing Width across flats H G J Rotating K Non-rotating Width across flats E C (Buffer body) Model 2 2 B D A B C D E F G H Vacuum inlet direction q Pad dia.
Basic style: MGGB 20 to 50 4-F through, counterbore G Bottom 4-H M N HR HN (MAX.)
3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.
Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.
Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.
0 @1 @4 o !2 w i !4 !6 !1 !7 !8 !9 r t !5 u q @3 @2 !3 Single acting/Normally closed @0 y Double acting/With fingers closed Component Parts Note Note Material Material No. Description No. Description Hard anodized Aluminum alloy High carbon chrome bearing steel q !4 Body Steel balls Stainless steel High carbon chrome bearing steel w !
Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !
Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !
N M P Auto drain Power cable holder 4 x 13 (Electric wire diameter 9 to 11) [opposite side] IDF55E, IDF75E R Compressed air inlet Port size Compressed air outlet Port size A Q G B E D Illuminated switch Ventilation air outlet Evaporation thermometer Ball valve Auto drain Terminal block F C Ventilation direction Ventilation direction J P L K Drain tube H M N (O.D. 10, length approx. 1 m) 4
Stations 1 2 3 4 5 6 7 8 9 M 148 AXT100-DR-11 173 AXT100-DR-13 AXT100-DR-15 198 AXT100-DR-17 223 AXT100-DR-19 248 AXT100-DR-22 285.5 SMC SMC 310.5 AXT100-DR-24 K K P P C C U U O O S S H H L L 57 53 51 335.5 AXT100-DR-26 33.5 AXT100-DR-28 360.5 18 IN OUT IN IN OUT IN AXT100-DR-31 398 725 Compact Manifold Regulator Individual Supply Type ARM11B Series How to Order ARM11B 1 3 Z 06 q w e i r
With float type auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV
21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 4 18 4 4 14 6 19.5 10 10 L A M H 17 8 21.5 26 18 Connection threads 19 10 24 41 29 22 12 25 58 46 Reference dimension for R threads after installation Male Elbow: KPL Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D.
21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 4 18 4 4 14 6 19.5 10 10 L A M H 17 8 21.5 26 18 Connection threads 19 10 24 41 29 22 12 25 58 46 Reference dimension for R threads after installation Male Elbow: KPL Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D.
TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order Clean Room Specification Series LJ1H10 High Rigidity Direct Acting Guide Type Motor Output: 50W/100W How to Order Motor output: 50W F P 2 B 1 X60 Stroke 1 LJ1H10 Horizontal