Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25 G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.
2 O-ring NBR NBR !3 O-ring NBR NBR !4 Gasket NBR, Stainless steel 304 NBR, Stainless steel 304 !5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.
H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.
With float type auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV
Note) Not applicable in case of standard dew points 20C (Nil) and 15C (symbol H). Note 2) Specifications with micro mist separator regulator are also available. See the order made section on page 35.
1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.
OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address.6 FEh FFh 15bit 8bit 7bit 0bit (H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90 h (L) 45 - 11.2 (IN Data)
lhe speciiicarron order sheel Nole 2) The mounl.g ,osron of the nam patc s o n _ p o p l " o l h o , " l o r h r " ' n , J AS hteface tir"Saul 31 slve Dode 2 rsolaled can1lnor 4 r/4oLi 3l s aye inode 2 so aled ccmnon Aslnterhce 8in/8oui 3l s av fiodE I so aled comnon ASnterface 4rn/4cui l1 sale.1odE I soatedcomrnon Nole) P and B pons Lrse the same lype ol 1 to 12 (16) Serial kt wilhout Sl
NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.
R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.
Pin, Mentfotd Block atignment. llcEslary lor al6gmblies ovgr lour i4) valvesI AXT 22&3 M0x60 MA 40$2 2 1 NXT 02(!144 NXT 0t&Sl P20 AXT 22S4A NXT 0t0.t7-, /.=.>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.
-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector
EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12
-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector