3 Port Air Operated Valve

N.O. 20.5 NC 12 41.1 3R 1P 91 83 33 60 83 61.3 91 41.1 12 NO 3/8 1(P), 3(R) port 1/8 (Pitch) P = 33 12(PA) port 31 M5 x 0.8 (Breathing hole) L1 L2 7.5 (Station n) (Station 1) 1/8 12(PA) port 12 93.5 70 13.5 47.5 2A 2A 3/8 2(A) port (Pitch) P = 33 31 2 stations 95 80 128 113 161 146 194 179 227 212 260 245 293 278 326 311 359 344 392 377 425 410 458 443 491 476 524 509 557 542 590 575 623

0.4

or less VQ1000 VQ1400 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Exhaust center 77 VQ1401 47 or less 25 or less 0.70 0.20 0.16 1.0 0.30 0.25 Rubber seal 33 or less VQ1500 40 or less 20 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Pressure center VQ1501 47 or less 25 or less 0.85 0.20 0.21 0.65 0.42 0.18 Rubber seal 33 or less A B C Dual 3-port

MY2

Refer to the Made to Order Specifications on page 33. Made to Order Specifications Refer to pages 33 through 35 for details.

CV/MVGQ

D-B5 D-B64 D-G5NTL 2015 + 50 ( n 2) (n = 2, 4, 6) 2 15 75 10 75 + 55 (n 2) Data 20 + 50 ( n 2) (n = 2, 4, 6) D-B59W 2 20 75 15 10-15-33 34 Series CVM3 Built-in One-touch Fitting CVM3 Mounting style Bore size For How to Order, refer to page 10-15-31. F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

MQQ

Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT

ARM10/11

If vibration is applied, malfunction or setting errors may result. 14-4-50 33 F.R.L.

CUJ

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

MG

28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling.

CL

11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

CNG

A B HS HS HS 2020.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 20 27.5 27 24.5 4 5.5 7.5 8.5 2.5 Data 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 30 29.5 27 4 5.5 7.5 8.5 2.5 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 33.5 33 30.5 5 6.5 8.5 9.5 3.5 23.5 (33) 17.5 (27) 20.5 (30) 22.5 (32) 19 (28.5) 40 38 37.5 35 10 11 13.5 14.5 8.5 ( ): Denotes the dimensions

Digital Flow Switch

-D) Connector cover (ZS-33-F) Attached the connector cover -68No.PF-OMP0002-H Revision history A: Modified errors in text.

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

HRX-OM-M090

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-49 5.17 Data reset function . 5-51 5.17.1 Data reset function . 5-51 5.17.2

HRX-OM-W058

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2

HRX-OM-X027

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2

HRX-OM-R016

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

HRX-OM-W038

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

HRX-OM-O021

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

HRX-OM-R005

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2