Electric Actuator

Rubber back of the belt is softened and sticky. f . Crack on the back of the belt 13.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

A port B port (mm) A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 0 0.043 0.004 0.012 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0 0.043 0.004 0.012 6 14 42 34.5 10 20 M5 x 0.8 1.5 17 7 10 0.5 36 M4 x 0.7 4.5 M4

Rotary Actuator/Vane Style Series CRB1

Symbol: C4 Symbol: C1 Add connection ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.

Manifold Specifications

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

Information

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Intrinsically Safe Valve 5 Port Solenoid Valve Series 53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C4 (ø4 One-touch Fitting), Thread: F (G), Foot Bracket: F (Bracket)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P,E Port Location: D Side, A,B Port Size: C4 (ø4 One-touch Fitting, Fixed), Thread: F (G)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 11 Stations, P,E Port Location: D Side, A,B Port Size: C4 (ø4 One-touch Fitting, Fixed), Thread: F (G)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 5 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 9 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 7 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 14 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 4 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting