38 44 44 60 70 3.5 3.5 3.5 4.5 4.5 4.5 6 6 18 19 25 30 35.5 39.5 47 58 10 10 12 12 16 16 20 20 8 10 10.5 13.5 15 18 21.5 28 3 3 3 4 4 4 5 5 6 6 6 6 6 6 8 8 8 8 9.5 9.5 11 11 14 14 4.5 4.5 5.5 5.5 7.5 7.5 9 9 M5 x 0.8 13 15 12.5 12.5 7 13 9 14 14 16 18 26 30 30 40 50 RB0806 M12 x 1.5 3 3 3 3 3 3 4 4 M5 x 0.8 5 5 17 17 21 22 24 24 M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 RB0806 M12 x 1.5
P Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 H 41 45 45 50 PG 22 27 27 29 I 28 33.5 37.5 46.5 GQ 4 7 7 8 PH 19.5 24 24 24 N 15 15 15 21.5 GR 4 7 7 7 PL 20 24 24 24 NA 24 30 34.5 42.5 H1 5 6 6 8 PW 38 41 41 41 K 5 5.5 5.5 7 RR 9 9 9 11 L 30 30 30 39 S 127 137 139 167 U 14 14 14 18 Z 198 212 214 256 ZZ 207 221 223 267 MM M8 X 1.25 1/8 1/8 1/8 1/4 M10 X 1.25 M10 X 1.25 M14 X
13 6 M20x1.5 M20x1.5 30 140 A1 (G1/4) A3 (1/4 NPT) AR (Rc 1/4) 55 G (1/2 NPT) 49 23.5 (35.4) M6/10 19 G1/4 6 (3 pcs) 5/16 UNC/13 77 26 30 6 26.8 52 45.5 77.5 31 33 33 (35.4) 26.8 135 28.25 14.5 F05-50 39.5 30 12 1/2 NPT 42 24.5 G1/4 or 1/4 NPT VDI/VDE 3845 Option J 100 73 ND9200, ND7200 ND9200/D, ND9200/I, ND9200/K and ND9200/B min. 60 ND9200, ND7200 Linear actuator 28 The feedback lever
= 2, 4, 6, 8, ) Note 1) 100 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, ) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10 100 100 110 2 Different surfaces 35 100 100 110 Same surface 55 Different surfaces 35 + 30 (n
+ 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75
75 80 90 100 1 Different sides MLGP 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2)
4, ) 75 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) ML2B D-A44 n 55 + 50 (n 2) (n = 2, 3, 4, ) 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 80 90 75 (Different surfaces) (Same surface) 20
(n:: 4. 8, 12, 16 .j (n :: 4, 8, 12. 16 .. ) (n = 4, 8. 12. 16) (n:: 2, 4. 6. 8 ) W ith 2 pes. (Dilferem surfaces 85 75 80 ' 0 Same sunacg). Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8."
DIN terminal (44) 31.5 T A IN OUT M B 2 x P Port size J I F (D) L K (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Port size P A B C E F I J K L D M T T T 55 (61) 126.5 (134.5) 74.5 (82.5) 82.5 (90.5) 69 (77) U 68.5 (74.5) U V U 107.5 (113.5) 29 60.5 (66.5) 5 C VXD2 3/4 27 64.5 52.5 30 30 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 1 29.5 67 55 32.5 33
'I. 78 2S 52 14 / 113 21 30 72 23 17 M1 2X l .75 _boot With boot PW S W H 12 ... 1 h f zz j IBore olze k U M MM MM (mm) XIUS N P PG PH PL 40 6 71 11 M1 4Xl .5 7/' 6 20 27 'I, 42 11 20 45 153 8 51 215 43 11 .2 59 223 168 0 I50 58 237 52 11.2 66 245 50 7 80 11 M18Xl .5 30 0/, 46 10 21 V.
side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.
Tube Dia, (mm) Material Lenqth Fittinss Total 0.5 m tube + 2 stn. fittinss l m 0.5 m Inserrype One'louch straisbt elbow sraight elbow 4 x 2 . 5 N,U 1.86 3.87 1.6 1.6 5.6 4.2 1.48 3.r8 6 x 4 N,U 6.12 7.78 6 6 l 3 . l t.4 3.72 5.96 8 x 5 U 10.65 13.41 l l (9.5) l l l 8 t4.9 6.73 9.23 8 x 6 N t6.& 20.28 l 7 (t2)l6 26.1 2t.6 10.00 r3.65 l0 x 6.5 U 20.19 24.50 35 (24r 30 29.5 25 r2.70 15.88 l0
Tube Dia, (mm) Material Lenqth Fittinss Total 0.5 m tube + 2 stn. fittinss l m 0.5 m Inserrype One'louch straisbt elbow sraight elbow 4 x 2 . 5 N,U 1.86 3.87 1.6 1.6 5.6 4.2 1.48 3.r8 6 x 4 N,U 6.12 7.78 6 6 l 3 . l t.4 3.72 5.96 8 x 5 U 10.65 13.41 l l (9.5) l l l 8 t4.9 6.73 9.23 8 x 6 N t6.& 20.28 l 7 (t2)l6 26.1 2t.6 10.00 r3.65 l0 x 6.5 U 20.19 24.50 35 (24r 30 29.5 25 r2.70 15.88 l0
VX22 0 5 6 VX23 0 5 6 VX070-029 4.1-3 VX21/22/23 Energized Closed (N.O.)
12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 L1 L2 569.5 74.5 102 129.5 157 184.5 212 239.5 267 294.5 322 349.5 377 404.5 432 459.5 487 514.5 542 64.5 92 119.5 147 174.5 202 229.5 257 284.5 312 339.5 367 394.5 422 449.5 477 504.5 532 559.5 1515 VFA1000/3000/5000 Series Dimensions: VFA3000 Series Type 30: VV5FA3-30-1-: Common exhaust 6 L2 L1 17.5 1/8, 1/4 [4 (A), 2 (B) port] 1 11.5 49 R
q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .
screw 2 1 3 (2b) How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6.
q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .
14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?
9.5.1 (P.30) 3 F0 Address(0) 0 4 F0 DATA(H) 9.5.1 (P.30) 5 F0 DATA(L) 6 F0 7 F0 815 F0 H= L= 46 - 11