New

30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

ZR

nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

HRX-OM-T004

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to

HRX-OM-Q033

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-Q033 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to

HRX-OM-S010

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS100/150 Series 4.5 Message configuration 4-9 HRX-OM-S010 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply

HRX-OM-R028

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to

HRX-OM-M091

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS Series 4.5 Message configuration 4-9 HRX-OM-M091 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read

VZS

VV5ZS2 C6 06 51G 1 VFN Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Plug-in type Stacking type manifold base with attachment plug lead wire NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2 stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 15 stations 15 Symbol Max. 15 stations.

Vacuum Module Series ZX

Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly. Lead wire length Note) If ordering switch with 5 m lead wire, specify both switch and lead wire connector part numbers. Nil 0.3 m (Standard) SP 6 10 15 20 25 30 0.6 m 1 m 1.5 m ZCUK Ordering example) ZX100-K150ZECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

VCC

Single valve unit VCC12(D)-02(F) 38.7 16.5 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

VQ20/30

The DIN rail is approximately 30 mm longer than the length of manifold. Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

AC Servo Motor Driver (SSCNET /H Type)

Parameter list (Driver side) 15 6.

VCL

36.5 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 332 Direct Operated 2 Port Solenoid Valve For Steam

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

16.5 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

A_HEC-OM-K001

9 Appendix 9.5.4 Recirculating fluid Pressure Loss Fluid: Water HED003 35 30 Pressure loss kPa 25 HED003-HW13 20 15 10 HED003-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-13 Recirculating fluid Pressure loss (HED003) HED005, HED007 35 30 Pressure loss kPa 25 HED005-HW13 HED007-HW13 20 15 10 HED005-HW19 HED007-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-14 Recirculating