Vacuum Pad

tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 2 2 5 7 2 2 5 7 2 2 5 7 12 18 12 18 12 18 M12 x 1 M12 x 1 M12 x 1 33 33.2 33 33 Width across flat 14 Width across flat 14 Width across flat 14 1.8 11 10 1.8 17 16 1.8 1 1.2 1.2 13 14 ZP3-T10UM;-A12-06 [Weight: 18.1 g] ZP3-T13UM;-A12-06 [Weight: 18.2 g] ZP3-T16UM;-A12-06 [Weight: 18.3 g] Applicable

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.

KS/KX

68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53 54 55 24 20.9 26 22 12 8 46.1 46.1 105 Applicable tubing Reference dimensions after R thread installation.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

18 18 13.5 SMC 9 (Rc(PT)1/4) (Rc(PT)1/4) 9 2-Rc(PT)1/4, 3/8 R1, R2 port M5 X 0.8 (Not applicable to standard.)

Rotary Table/Rack & Pinion Style Series MSQ

1 1 1 1 12 12 12 12 12 12 12 1 1 1 1 4 4 4 Parts included 13 13 13 13 17 17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

Shock Absorbers and Rate Controls

5 .38 .71 .65 t 1 t.37 .71 .63 .n SLA 9/l6ll Ex.50 stA ir r34 (rR)0rM.35 .5 to .63 tl5 18 lJNt .31 r.55 .tl .63 .18 SlAVl-|6 x-50 5tA 338{7 trRl0Eril.5 .5 .94 .55 V,r . 16 Uflt .43 r.64 .98 .88 ,28 SLAl -l2xl 5ta 33848 (rRloEMt.01.0 1.50 1.80 I,r2 UNt .59 2.88 1.42 1.25 .39 \oles: L To bp used d t r -or D-fio1 -odpl\ ontt 2.

4/5 Port Air Operated Valve Series SYJA3000

double: SYJA7220-01 2 position double: SYJA72402-4.3 (For mounting) 63.6 34 8.5 2-M5 x 0.8 1 (Pilot port) 13 3 1 A B B A 2-M5 x 0.8 34 2-3.2 27 17 A B (Pilot port) (For manifold mounting) 1 35 R1 P R2 31.5 2-3.2 18 35 (For mounting) 63.6 Manual override 74.6 28 29 25 21 1.6 14 74.6 Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Section 11.8 1 5 1.

Modular F.R.L. Units

38.4 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8 1/8 1/8 1/8 1/8 126.4 167.4 167.4 220.4 235.4 87.6 115.1 115.1 147.1 149.1 35.9 38.1 38.1 39.8 37.8 41.6 55.1 55.1 72.6 77.6 60 80 80 110 110 23.4 30.5 30.5 36.1 39.6 30 41 41 50 50 43.2 57.2 57.2 75.2 80.2 24 35 35 40 40 33 5.5 7 7 9 9 12 14 14 18 18 3.5 4 4 5 5 29 41 41 48 48 Model Semi-standard specifications Optional specifications

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

Fieldbus System

11.5 (11.8) (7.5) 8 P 1 P 1 63.1 56.6 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 40.2 13.2 21.6 A 4 A 4 A 4 A 4 A 4 18 10.6 13.6 (For DIN rail mounting) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" (Pitch) P = 10.5 (17.8) 18.3 15.5 Note 1) These figures show the SS5Y3-10S6Q22-05D-C6.

CKZ2N

1 10 R25 19 18 19 R6 NAAMS code A Weight kg (lbs) 90.0 120.0 150.0 B 55.0 85.0 115.0 Part no.

10

) 94 (102) 100.5 R 34 (39.5) 45 (53) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

Low Friction Cylinders Series MQ

I NA D J A F N2 N1 MM S + Stroke F H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc 1/8 13 NPT 1/8 25 G 1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc 1/8 13

0.55

Pg9 6 to 8 1/4 2 x 1/8 (External pilot port) Pilot EXH 2 x 8.5 (Mounting hole) EXH 221 230 PE PA 137 144 128 118 85 78 OUT IN EXH 55 55 25 4 1 1 / (EXH port) 36 36 82.6 4 1 2 x / , 1, 1 / 4 3 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts