Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size

REC

X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 150 to 700 146 20 8 21 215 M26 X 1.5

MGC

70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

Pulse Valve

470 910 1850 Direct piping type 290 500 1230 55-JSXFA Pilot port Port size: 3/4, 1 1 No condensation Replacement Parts Model Replacement part number Main valve assembly (Main valve + O-ring) Sub-valve assembly (Sub-valve + O-ring) Silencer 55-JSXFA(E, F)-06m-B-m JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT

SX

-51A-N7 VVQ1000-51A-N9 One-touch fitting for 1/4" One-touch fitting for 5/16" Note 1) P and R ports cannot be changed.

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

0.4

.16 stations 16 Note) 16 stations With DIN rail bracket (Without DIN rail) Note 1) Refer to page 419 for details.

V

Exhaust) 1 Plug in unit T Y P E O F M A N I F O L D N U M B E R O F S TAT I O N S 01 1 Station 16 16 Stations N o t e 1 ) When more than one option is desired Combined symbols in alphabetical order.

Table of Contents

Note 1) Connector entry direction 16 16 stations Top entry Side entry U S Note) For details, refer to page 2-4-29.

SZ3000

16 16 SOL.A SOL.A SOL.A 15 15 15 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 Triangle

ZP3

Form w 1 Material C 04 4 4.5 1.2 7 6 0.5 06 6 6.5 N S U F GN GS HS A 0.8 08 8 8.5 10 10 11 9 7 1 13 13 14 1.2 16 16 17 B ZP3 (10 to 16) (4 to 8) UM 2 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 16 w q ZP3 T N 04 A5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

1 1 1 1 1 1 1 38 55 72 100 20 22 32 40 4.5 5.5 6.5 9.0 10 12 16 19 6.0 9.5 11.0 14.0 Applicable cylinder Model Mounting direction q C1 D1 F1 K1 10 11 16 20 Q1 B1 A1 MYAJ16 MYAJ25 MYAJ40 MYAJ63 MY316 MY325 MY340 MY363 29.0 38.5 56.0 86 68 90 130 186 34 45 65 93 18 24 32 50 88 112 162 226 5.5 6.5 9.5 10.0 Applicable cylinder Model Mounting direction w B2 A2 C2 D2 F2 K2 Q2 MYAJ16 MYAJ25 MYAJ40