AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

TROUBLESHOOTING 8 1 to 8 -13 8.1 Alarms and warning list . 8 2 8.2 Troubleshooting at power on . 8 3 8.3 Remedies for alarms . 8 4 8.4 Remedies for warnings . 8 -12 9. OUTLINE DRAWINGS 9 1 to 9 5 9.1 Driver . 9 2 9.2 Connector . 9 4 10.

Applicable Auto Switch Model

5 23 Reed switch D-A73C D-A80C 12 54 D-9lA 9 47 Reed switch 2 wire D-A79W 11 53 10 47 D-E7lA D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color 3 wire 7 37

LEC-OM02904

. 9 8.2 . 9 9 UL/cUL . 12 1 1 * * ** 1.1 (PA) (PB) No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Stability of suction position,

9 35 9 9 9 9 B A 15 35 B A 35 14.5 Bushing Bushing Bushing M18 x 1.5 M10 x 1 M18 x 1.5 M18 x 1.5 B A M10 x 1 M10 x 1 Seal washer Seal washer Seal washer D D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6

Sine Rodless Cylinder Series REA/REB

9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

SMC Electronic Switch Series Variations

Output Specifications 14 15 16 17 18 19 55 NPN Open Collector 30V, 80mA Model Output method Hysteresis Analog output Number of outputs Indicator light Trimmer adjustment PNP Open Collector 80mA 1 to 10% of set press. (Variable) 3% F.S. or less (Fixed) 1 to 10% of set prss. (Variable) 1 to 5V 1-10% of set press.

Auto Switch Guide

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

Auto Switch Guide

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

Auto Switch Guide

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

Compact Rotary Actuator Series CRQ2

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

KJ

41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H E A B L1 L2 M F G 2 LQ1R1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 12 15.5 1/8" 10 4 8 18.5 11.5 LQ1R4C-M LQ1R4B-M LQ1R4A-M LQ1R3D-M LQ1R3C-M LQ1R3B-M LQ1R3A-M LQ1R2F-M LQ1R2E-M LQ1R2D-M LQ1R2C-M LQ1R2B-M LQ1R2A-M 1/8" 19.5 4 16 14 15 6 12 28 16.5 22 1/4" 1/4" 19 25 5 17 20 9 18 36.5 23 21 27 3/8" 3/8" 23 29 6 21

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

9@0@1 Seal kit CR FKM Si Material Dust cover @2 Finger assembly rty!1!3 Mounting thread wo!0!

CJ2

Basic Foot Front flange Double cleivis JT2Q10 SCJ210, #1 SCJ210, #1, #3 SCJ210, #1, #9 SCJ210, #5 JT2Q16 SCJ216, #1 SCJ216, #1, #3 SCJ216, #1, #9 SCJ216, #5 The data shows auto switch equipped styles.

ARM10/11

4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 ARM3000 0.47 0.11 Individual IN 3 8 3 8 1 8 Weight by the Number of Stations (kg) Stations Model 2 3 4 5 6 7 8 9 10 ARM2500 0.68 1.25 0.96 1.75 1.23 2.25 1.51 2.75 1.78 3.26 2.06 3.76 2.33 4.26 2.61 4.76 2.89 5.26 ARM3000 14-4-55 38 Series ARM2500/3000 Option: Pressure Gauge (Max. pressure indication: 1.0 MPa) Flow

ARM10/11

4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 ARM3000 0.47 0.11 Individual IN 3 8 3 8 1 8 Weight by the Number of Stations (kg) Stations Model 2 3 4 5 6 7 8 9 10 ARM2500 0.68 1.25 0.96 1.75 1.23 2.25 1.51 2.75 1.78 3.26 2.06 3.76 2.33 4.26 2.61 4.76 2.89 5.26 ARM3000 14-4-55 38 Series ARM2500/3000 Option: Pressure Gauge (Max. pressure indication: 1.0 MPa) Flow