High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

LEC-OM02904

PA09 RSP PB07 PG1 (2) 1 1 2 (No.PA09) 1 3 4 (No.PA080) 5 6 (3) (PB07) () r/min ) (r/min se) 262144(pul 60 (pulse) 6 12 7 7 . 2 7.1 . 2 7.2 . 2 7.3 . 5 7.4 . 7 7.5 . 11 7.6 . 11 7.6.1 . 11 7.6.2 . 12 7.6.3 . 13 7.6.4 . 15 7.7 2 . 17 7 1 7 7 6 () 7.1 No.PB16 No.PB23 PB01 PB16 PB23 No.PB01 0 0 0 M 1 1 1 2 2 1 1 2 7.2 (1) II() ( ) II()1002.25kHz 7 2 7 (2)

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

C92

1 !2 !3 No. !4 !5 !6 !7 !8 !

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Limited) LE-CSE-SA (Note) Signal layout (Note) Signal layout LE-CSE-RA 2 6 10 (Note) Signal layout 4 2 8 6 10 LG 8 4 MRR LG 9 SHD 7 5 MR 3 P5 1 MRR or 1 5 9 8 6 P5G 4 MRR 2 BAT 1 3 7 9 5 3 7 P5 BAT P5 MR BAT MR LE-CSE-SB View seen from wiring side.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

'SI-I COM '61+1 ellAlions{aQYg {-I 6'I.tiOr'll{~\l {-I C221+1 ~221+1 COM,S 1+1 SOL.A,O I_I SOL.A,O I_I ~201-1 7 .Ia'ion. { SOL. 211I COM '81+1 ~201-1 7.1allon.{ SOL. 2' I_I COM 1\11+1 7.tatlOnS{~23(-) 7118110nl {aQY 23 (-) ~111+1 C111 +1 SOL.A2 (_I SOL.A2 (_I SOLA., 1_ I ~231-1 ~1Iono{~2'1-1 r:.ilon. { SOL. 2' I I ~~lion'{~'2(-) ~tiono{~ '21-1 ~251+1 COM 22 1+1 COM 221+1 C251+1 (Note 1) MaxImum

Auto Switch Guide

Precautions Lead wire Oil resistant vinyl heavy-duty cord, 3.4, 0.2 mm2, 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 10-20-7. Note 2) Regarding the lead wire length, refer to page 10-20-7. 1. Confirm that the connector is appropriately tightened.

Auto Switch Guide

Precautions Lead wire Oil resistant vinyl heavy-duty cord, 3.4, 0.2 mm2, 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 9-15-7. Note 2) Regarding the lead wire length, refer to page 9-15-7. 1. Confirm that the connector is appropriately tightened.

KJ

41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22

Auto Switch Guide

Precautions Lead wire Oil resistant vinyl heavy-duty cord, 3.4, 0.2 mm2, 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 6-16-7. Note 2) Regarding the lead wire length, refer to page 6-16-7. 1. Confirm that the connector is appropriately tightened.

Applicable Auto Switch Model

switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color 3 wire 7 37 D-F9l 2 2 wire 7 32 color 3 wire 7 34 D-F9BA 37 5.3-75

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Sine Rodless Cylinder Series REA/REB

15 39.5 14 20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54 Rc 1/8 G 1/8 7 76 13 REAR40 26 40 93 34 60 NPT

Stability of suction position,

M14 x 1 Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats

C95Series

,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-31 -S31 -32 -S32 Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Blank plate SYJ3000-21-1 A Mark A Mark Blank plate SYJ3000-21-1 Manifold gasket Manifold gasket VJ3000-14-3 VJ3000-14-2 Dust cap SYJ3000-42-1 Applicable manifold base SS5YJ3

VM

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23

CJ2

1 !2 !3 !4 !5 !6 !7 !8 !

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.