Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

Hygienic Design Cylinder Series HY

8 Rc 1/8 Rc 1/4 Rc 1/4 G 1/8 G 1/8 G 1/4 G 1/4 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 20 20.5 22 24 Individual -X Technical data Note 1) Refer to page 888 for details about the optional parts (plug bolt).

2/3 Port Valve

210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Hydraulic Cylinders

49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

Guide Cylinder/Compact Type Series MGC

(Set the maximum allowable load so that it does not exceed the following percentages of the theoretical output: 40% for 20, 50% for 25 and 32, 55% for 40 and 60% or less for 50, respectively.) 400 Guide Cylinder/Compact Type Series MGC Construction: With Rear Plate t q $3 @2 !5 @6 #1#2 #3 !8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !

One-touch Fittings

Series/ Spare Parts P.48 Inch P.29 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V How to Order P.50 Variations P.51 Dimensions P.52 Made to Order/Clean Series/ Spare Parts P.55 Inch P.49 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V Face Seal Connection thread Applicable tubing G R Rc NPT R How to Order P.58 Variations P.59 Dimensions P.60 Spare Parts P.63 Metric P.57 2 3.2 4 6 8 10 12 16 V V How

F

2.5 9 4 4 M5 x0.8 KSH04-01S 12.5 38 34 16 12 14 2.5 4 1/8 4 KSH06-01S 14.5 39.5 35.5 17 14 17 13.4 6 1/8 4 14 23 KSH06-02S 14.5 42.5 36.5 17 13.4 1/4 6 17 23 KSH08-01S 17.5 44 40 18.5 26.1 8 1/8 6 17 29 KSH08-02S 17.5 47 41 18.5 26.1 1/4 6 17 37 KSH08-03S 17.5 48 18.5 41.5 26.1 3/8 22 55 KSH10-02S 22.5 54 21 7 48 36.3 10 1/4 22 63 KSH10-03S 22.5 55 21 7 48.5 36.3 3/8 22 81 KSH10-04S 22.5

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

tubing size (mm) 1/8" x 0.086" No. 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No. 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7* 7* 7* 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 1/8" 1/4" x 5/32" 1/8" 1/4" 6 x 4 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 3/8" x 1/4" 1/8" 1/4" 1/2" x 3/8" 3/8" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 Solenoid Plug-In Factor 4.4 5.4 5.7 4.4 5.4 5.7 3.7 4.6 4.8 3.9 4.8 5 3.9 4.8 4.9 2.2 2.7 2.8 Time (ms) Single NVFS5100 45 or less 2 Position Double NVFS5200 25 or less Closed Center NVFS5300 55 or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or

mb1

37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up

70astamb1

37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M10 x 1.25 52 1 12 28 40 Rod end nut 15 Flat washer 19.6 10 17.5 7 7 10 28 32.5 + Stroke 22.5 40 55 + Stroke 17 6 Note 1) Standard strokes available in 5 mm increments.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 3-8H10 depth 5 92 11.5 20 67 90 (T-slot pitch) 45 9.4 62 92 8-6.6 4.5 10 58 30 Stroke + 216

Square Tube Type Air Cylinder Series MB1

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Basic type, Foot type, Front flange type, Rear flange type Single clevis type, Double clevis type Mounting bracket Note) When there is no air cushion, the unit is equipped with rubber bumpers.