ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

0.4

1 4 3 2 1 4 4 3 2 1 IP65 compliant VV5Q11 VV5Q21 Direct electrical entry.

Electric Actuator

2 (ISO14644-1)!

Electric Slide Tables

1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

ZP

2 !0 !1 Component Parts o No.

•

-::-t-D~ F50W 25+55 1 n 2) 12S + 5S ln ;,l) 135+55(n;:4) W~tl, pes (Dlflerenl surfaces. 90 95 '5 Same surface). Wiin 1 pc DM90AVL 15+30(n.=.1}2 9O + 30 ~2 95 + 30 (n 2 4 4) With n pes. 2 ~-u~~rr~_~~ ( " 2~. 4 6~~~__~__~_ 4 ,--8 ' 2 .c..; 1~ "'~__ ("~_ 8 .~~2~' .. .) _ _ ~~=-= ~.~.S.. -) ( " =~ ~.~~ 6_ ) +-_~ = 4 ~.~ 1 . ~6 ,--,L g:~~~A6U With 2 pes. (DrHerent surface-so 25 125 135 gj.

Modular Type Regulators Series AR

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 39.5 43 75 90 46.5 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 464 SP093-001I Issued: Sep 2009 P.G.

Clamp Cylinder Series CK1

Description Material Qty Note 18 19 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Retaining ring Clevis bushing Chromated Hard anodized Chromated Hard chrome plated 2 Steel wire 1 1 1 1 1 1 2 3 2 4 1 2 2 1 1 1 Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Copper alloy Aluminum alloy Aluminum alloy

Hydraulic Cylinders

(built-in magnet) Nil S n 2 pcs. 1 pc.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 50 50 50 D-A9 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 25 25 25 D-A9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs.

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting

AS

/FPG How to Order 1 1 2 F P Q 01 06 AS 2 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

VQZ1000/2000/3000

) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

2/3 Port Valve

320 210 320 210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

AW

Modular Type Filter Regulators Series AW Filter Regulator Series AW Model Port size Options AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 AW60 3/4, 1 Pages 366 through to 377 Filter Regulator with Backflow Function Series AWK AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket AW40K-06 3/4 Float type auto drain AW60K 3/4, 1 Square embedded type pressure gauge