Auto Switch Guide (Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
1 A14 M14 x 1 Type Symbol Size Pad diameter [mm] 10 to 16 20 to 32 40, 50 i Lock ring Lock ring unit A5 M5 x 0.8 1 A6 M6 x 1 1 1 1 A8 M8 x 1 1 1 Part no.
Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across
Flow Characteristics at the Number of Manifold Stations (Operated individually) Model Passage/Stations Station 1 Station 5 Station 10 b C [dm3/(sbar)] 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 1 4/2 (P A/B) Non plug-in type: 6 stations (Manifold base) VV5FS4-10-061-04 1 (2 position single) VFS4110-5D 5 (3 position exhaust center) VFS4410-5D 1 (Individual
35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q R S Q R S T 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 64.5 67 67 67 69.5 69.5 69.5 36 46 44 45 50 48.5 49.5 52.5 55 55 55 57.5 57.5 57.5 99.5 38 47.5 46 47 52 50.5 51.5 68.5 71 71 71 73.5 73.5 73.5 78.5 88.5 87 90 93 91.5 94.5 102 102 102 104.5 104.5 104.5 2 3 12 Direct Operated 2 Port Solenoid Valve Series
2 1/2 205 202 11 90 262 20 146 9 18 108 55 31 9 15 276 262 26 Series IDG1 I N SMC SMC SMC 2 SMC 202 60 Port size 1/8, 1/4 119 41.5 30 Dew point indicator (Option: S) 5.5 29 24 24 67 OUT IN 10 116 Drain Discharge 9 133.5 140 136 97 With float type auto-drain (N.C.) 3.2 5.5 Purge air for dehumidification 12
40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.
9 9 8 94 83 77 75 16 13 12 11 5.5, 9.5 counterbore depth 6 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18
Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR
8 83.2 87.6 26.5 41.6 25 21 2 30 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 AC30B-D 1/8 110.2 115.4 30.5 30 55.1 35 26.5 3.5 41 35 7 14 6 42.5 42.5 1/4, 3/8 AC40B-D 1/8 145.2 147.1 35.5 38.4 72.6 40 35.5 0 50 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40B-06-D 1/8 155.2 149.1 35.5 38.4 77.6 40 35.5 0 50 40 55 9 18 7 50 65 3/4 AC50B-D 1/8 186.2 220.1 43 38.4 93.1 30 45 0 70 50 70 11 20 8 60 80 3/4, 1 AC60B-D
(Different surfaces, Same surface), With 1 pc. 135 125 25 135 + 55(n 4) 2 25 + 55(n 2) 2 (n = 4, 8, 12, 16) 125 + 55(n 4) 2 With n pcs. (Same surface) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 145 35 155 D-F5NTL 35 + 55(n 2) 2 (n = 4, 8, 12, 16) 145 + 55(n 4) 2 155 + 55(n 4) 2 With n pcs.
Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR
+ Stroke 41 84.5 Retraction locking LOCK 30.5 Pc PL Port thread type Rc NPT G 1/8 1/4 M5 x 0.8 Dust cover (Manual unlocking unit) PL unlocking port Unlocks when pressurized Rod end male threads M18 x 1.5 11 26 28.5 33.5 Rod end nut 11 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/63 (Emergency Stop) Foot type/RLQL63 41 55 + Stroke 18 46 91.5 Special cap bolt 5 3.2 95
33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN Width across flats B2 H2 GB N Rc P 4-FD
1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.
@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.
SW Enable SW SW 12 Unit name W 1 W-AREA1 W 1 AREA ON (mm) W 12 AREA ON + *W 1>=W 2 ,PARA W 1=W 2=0 AREA OFF W 2 W-AREA2 W 2 + ORG Correct * Sensor type * 1 (CC-Link () 1 (CC-Link ) ) () Option 1 1 (1 ) 14 (Occupied number of stations of CC-Link) 2 (2 ) 4 (4 ) CC-Link (CRC ) 11 CC-Link 11 CC-Link CC-Link 0 () UndefineN o.11 0,10 (Operation setting at CC-Link communication
Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !
Opposite side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43 75 88.5 CXS6-30 40 30 53 85 98.5 CXS6-40 50 35 63 95 108.5 CXS6-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3
x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time