Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 H J K L M1 M2 N P Q R S T U V1 V2 W X Y1 Y2 Z Q1 Q2 Q3 Q4 10 29 22 8 14 40.004 0.016 9 0 0.036 1 1 7 5 9 0.5 16.5 8.5 9.5 14.5 M3 x 0.5 3.5 3.5 M3 x 0.5 21 10.6 3 37 44 19.8 31 25 17 41 15 34 25 9 18 50.004 0.016 12 0 0.043 1.5 1.5 6 6 10 0.5 19 11 10 17 M3 x 0.5 M3 x 0.5 3.5 3.5 M3 x 0.5 24 12.6 3 44.5 52 21 36 29 21 48 20 42 34.5 10 20 60.004 0.016

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

MXS Series Air Slide Table

7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6-10 MXS6-20 MXS6-30 MXS6-40 MXS6-

CRBU

Refer to p.1.2-7 for further information.)

V

-02-08S 8 R(PT)1/4 14 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 34.7 28.7 19 21 47 ASV410F-02-10S 10 R(PT)1/4 14 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 34.7 28.7 21 23 49 PT* Remove (N) when ordering N NPT ASV410F-03-08S 8 R(PT)3/8 17 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 36.7 30.4 19 21 61 ASV410F-03-10S 10 R(PT)3/8 17 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 36.7 30.4 21 23

Digital Gap Checker ( compatible)

"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009

Rotary Actuator

7 !4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Compact Cylinder with Air Cushion

, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 7 7 8 7 8 8.5 8 9 D-F7LF D-F9, F9V D-F9W, F9WV D-F9BAL 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

HRX-OM-X010

3: PUMP IV is switched from FLOW to FREQ. . 5-40 Chapter 6 Error Message and Troubleshooting . 6-1 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 HRZ

VZS

For details, refer to pages 3-7-19 and 3-7-20.

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

One-touch Fittings

[mm] 1 D1 Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2T04-M5G1 7 8.2 7.7 10 7 15.4 14.8 15.9 13.3 4.5 4.5 2.5 3.9 6 M5 x 0.8 KQ2T06-M5G1 7 10.4 9.7 12 7 14.5 16.5 18.7 13.3 4.5 4.5 2.5 4.4 L1 L1 M M Oval type A L2 4, 6 1: D1 is maximum diameter.

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube ) 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Refer to pages 4 through to 7 for the JIS symbol.

Round Type Hydraulic Cylinder

6 51 21 68 12 8 41 5 8 30 5 M8 x 1.25 13 26 23 f8 25 Up to 800 19.5 M10 x 1.25 22 44 17 32 12 16 7 9 53 27 70 12 8 46 6 8 32 5.5 13 28 25 f8 32 Up to 800 21 M14 x 1.5 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 13 36 31 f8 40 Up to 800 21 M16 x 1.5 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 19 44 34 f8 (mm) Bore size (mm) NB NC NN S ZZ P 20 19 15 M22 x 1.5 1/8 81 138 25 19

C95

7 !8 !

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

Modular F.R.L. Unit

Float type auto drain AD37NNote 7) AD37NNote 7) AD47NNote 7) AD47NNote 7) AD47NNote 7) AD47NNote 7) AD47NNote 7) N.C.

AC

End plate ass'y 1 pc. 1.5-26 ARM2500/3000 Dimensions Dimensions B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Manifold stations Dimensions by Number of Stations 10 Model Symbol 9 8 7 6 5 4 3 2 454 412 370 328 286 244 202 160 118 L1 ARM2500 442 400 358 316 274 232

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592