Modular Type Regulators Series AR

34 36 128 M42 x 1.5 34 3.5 35 45 42.5 74 42.5 74 70 1/4 1/4, 3/8, 1/2 28 27.8 36 34 3 75 129 M42 x 1.5 34 35 45 42.5 74 42.5 74 3/4 1/4 AF 28 27.8 43.5 43 3.3 169 90 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 3/4, 1 28 27.8 43.5 176 46 3.3 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 95 1 AR Optional specifications AL Bracket mount Panel mount Model M N Q R S T U V W Y Z AW AR10 AR20(K) AR25

VFS

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Process Valve Series VNA

to 9 Note1)TZ Note1)TL CE compliant D DIN terminal Valve size 1 to 9 DIN terminal with light/surge voltage suppressor DZ Note 1) Except rated voltage: 6, 7 and 9.

HRX-OM-S004

Terminal resistance 1 1 1 9 5 9 5 9 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance120 Master This product This product This product (first slave) second slave 31st slaves Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

CJ5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38

CJ5-S

40 Up to 500 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 149 50 MK(2) Up to 600 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 176 63 Up to 600 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 176 80 RS Q G Up to 750 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8

7

9 !8 r u !7 @8 @5 @6 @7 @9 CKG1C (Clevis width 12.5) i !2 #1 !3 !5 !0 !1 Component Parts No. Description Material Qty Note No.

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

IDG

With float type auto-drain With drain guide Port size A B C D E J K L M N F G H Model P IDG3M/3HM/5M/5HM IDG10M/10HM 157 201 226 150 146 56 87 196 162 158 99 1/8, 1/4 5.5 66.5 35 210 196 15 9 IDG20M/20HM 1/4, 3/8 205 201 66 130 209 13 12 223 209 IDG30M/30HM 162 158 87 6 78 40 20 303 IDG30LM 149 145 56 86 196 9 210 196 5.5 7 5.5 70 95 70 35 50 35 15 22 15 IDG50M/50HM 3/8 177 172 80 87 241

Standard Combinations

SUP 1/8 11 (0.60) 10 (0.54) VHS20 1/8 1/4 16 (0.87) 14 (0.76) 1/4 14 (0.76) 16 (0.87) VHS30 OUT IN 1/4 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) B 3/8 VHS40 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) Note) Use an air filter on the IN side for operating protection. EXH.

AW

160 201 239 242 409 25 40 53 70 75 95 1/16 1/8 1/8 1/4 1/4 1/4 25 40 55 80 80 20 AR M38 x 1.5 M42 x 1.5 1/4, 3/8, 1/2 3/4 3/4, 1 AL M42 x 1.5 AW Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R 4.5

SY

1 40 LO Z With indicator light/ surge voltage suppressor (non-polar type) U 1 SY 9 1 40 LOZ For AC: Note) For "Z", only positive COM specification is available.

CG5-S

to 800 1/8 30 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 93 147 50 32 to 1200 1/4 35 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 109 172.5 63 32 to 1200 1/4 35 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 109 174 80 37 to 1400 3/8 40 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 130 208 100 37 to 1500 1/2

Compact Cylinder with Air Cushion Series RQ

23 7 49.5 14 1/8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.

CNG

201 to 350 201 to 350 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 to 300 20 to 300 104 30 27 19 52 112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M

Compact Cylinder with Air Cushion and Lock Series RLQ

to page 857 for details of rod end nuts and accessory brackets. 854 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions: 63 (Emergency stop) Foot style: RLQL63 41 55 + Stroke 18 91.5 Special cap bolt 46 CLJ2 5 4 x 11 95 3.2 9 16.2 9 16.2 CLM2 113 70 + Stroke 122.2 + Stroke CLG1 CL1 MLGC Rod end nut 43.5 CNG Rod flange style: RLQF63 MNB CNA 60 80 CNS 9 4 x 9 92 41 55 + Stroke

SYJ3000/5000/7000

0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold

Compact Cylinder with Air Cushion

Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.