3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39

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Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

ZR

OFF ON OFF Combination Symbol: K3 Combination Symbol: C3 Feature: Operation can be controlled by an external pilot valve.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

(Refer to Design and Selection on Specific Product Precautions.) 200 VAC (50/60 Hz) J1 J2 Note 1) 3 Note 3) Normally closed None 110 VAC (50/60 Hz) 4 Note 3) Normally open None 220 VAC (50/60 Hz) Q1 Q2 N1 N2 5 6 Latching positive common Normally closed 24 VDC Latching positive common None 12 VDC Latching negative common Normally closed Note 3) CE compliant products are not available for

EtherNet/IP TM Compatible Fieldbus System

(for M12 connector socket) For unused branch connector (OUT). 1: Refer to page 12 for wiring. 2: Refer to page 58 for display. 50 No.EX-OMS0014-A Mounting and Installation Installation EX500-DXPA Install the product using 2 M4 screws x 20 mm or longer with a head 8 minimum.

Moisture Control Tube

factor C2 10C Volume ratio (Kv) 25C 40C 0.2 0.4 0.6 20% 0.5 1.0 1.3 40% 1.0 1.7 2.8 60% 80% 2.1 4.0 5.9 Correction Factor C3 for Supply Pressure Correction factor C3 0.4 Supply pressure (MPa) 0.3 0.4 0.7 0.5 1 0.6 1.25 0.7 1.6 5 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Dual Rod Cylinder Series CXSJ/CXS

Bore size 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

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Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.