2

0.2 3/16 KQ2N01-05 37 13.3 13.3 2.1 0.4 Applicable fitting a 5/32 3/16 KQ2N03-05 37.5 13.3 13.3 2.5 0.4 1/4 KQ2N03-07 38 13.3 13.3 2.5 0.6 3/16 1/4 KQ2N05-07 38.5 13.3 13.3 3.4 0.6 5/16 KQ2N05-09 41 13.3 13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-05-C6(-Q) C6: With one-touch fitting for 6 One-touch fitting for 8 C8 One-touch fitting for N9 5 16" SS5Y3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

Table of Contents

22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x

Table of Contents

1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 34.5 18.5 17.5 17 9.6 15.5 2.5 1 8 9.2 34 10 34 34.5 34.5 36.5 37 40 40 41 44 5 32 17.5 16 3 10.4 11.4 10.7 18.5 18 18.5 19.5 3 16 16.5 3.5 Applicable fitting size 1 4 13.2 17 4.6 5 16 14 18.5 6 19 21 7 3 8 17.9 Note) D: Max. diameter 22 Bulkhead Union: KQ2E Applicable tubing O.D.

Fluoropolymer Piping Equipment

16 LQ3B61-M 25 1/2" 42 7 26.5 24 14 28 32 64 61.5 LVN 10 10 LQ3B62-M 3/4" 42.5 52 16 16 LQ3B63-M 1" 53 22 22 50 LQHB 8 30 26 18 36 41 78 74 49 TL TIL Inch Size TLM TILM Model Applicable tubing O.D.

Hydraulic

size (mm) Part no. l J P H A B C D d K L E 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0

Made to Order

A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st

Combination Cylinder

20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 112.5 121 133 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 X 1.75 M12 M14 X 1.5 M14 X 1.5 M16

Smooth Cylinder/Low Speed Cylinder

A L1 MM R1 ND E1 U1 A1 16 20 22 28 38 44 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 25 30 30 40 50 55 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 16 20 36 44 56 64 21 25.6 41.6 50.6 64 72 20 25, 32 40 50, 63 80 100 8.5 10.5 16 20 23 24 10.3 12.8 12 16 21 24 34 41 42 56 71 79 +0.4 +0.2

1

st 11 to 39 st 55 41 to 99 st 85 101 to 249 st 1 10 to 39 st 13 41 to 99 st 43 101 to 249 st 12 16 42 12 16 43 2064.5 95 0 18.5 49 65 95 3 19 49 46 49 Single rod style (Long stroke) Bore size (mm) Applicable stroke Data A B A E A E Bore size (mm) Bore size (mm) 21 to 74 st 84.5 76 to 199 st 122 201 to 399 st 0 21 to 74 st 31.5 76 to 199 st 69 201 to 399 st 21 to 39 st 41 to 124 st 126 to

CL

16 22 27 27 32 41 100 110 130 160 180 230 255 275 8 11 11 13 16 71 81 101 119 133 145 160 180 80 90 105 130 150 190 212 236 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35 40 40

CV/MVGQ

90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

CV/MVGQ

90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

Air Cylinder

5 8 28 5 6 M8 x 1.25 15 24 M20 x 1.5 1/8 19.8 14 62 37 103 25 22 19.5 17 32 37 10 13 40 7 4 60 75 45 6 8 33.5 5.5 8 M10 x 1.25 15 30 M26 x 1.5 1/8 22 14 62 41 107 32 22 19.5 17 32 37 12 13 40 7 4 60 75 9 45 6 8 37.5 5.5 10 M10 x 1.25 15 34.5 M26 x 1.5 1/8 25.8 16 64 41 109 40 24 21 22 41 47.3 14 16 52 7 5 66 36 82 10.5 50 8 10 46.5 7 12 M14 x 1.5 21.5 42.5 M32 x 2 1/4 29.8 16 88 45 138

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

AC Servo Motor Driver (Pulse input type/Positioning type ）

POSITIONING MODE . 16-4 16.1 FUNCTIONS AND CONFIGURATION . 16-4 16.1.1To use positioning mode . 16-4 16.1.2 Positioning mode specification list . 16-5 16.1.3 Function list . 16-8 16.2 SIGNALS AND WIRING . 16-12 16.2.1 I/O signal connection example . 16-12 16.2.2 Connector and signal arrangement . 16-18 16.2.3 Signal (device) explanations . 16-21 16.2.4 Analog override. 16-41 16.2.5 Internal

Air Cylinder Series CA2

2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) 95 + 40 (n 4) 2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) 15 + 40 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) CS1 2 (Different surfaces and same surface) 1 65 70 75 10 60 CS2 D-M9AVL (n 2) 2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 70 + 30 (n 4) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) 10 + 30 n (n =

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

61.5 32 37 19.5 22.5 51.5 54.5 21 25 22.5 24 24 22.5 19.5 16 26 26 24 56.5 61.5 67.5 62.5 57 49 24.5 26.5 26.5 24.5 22.5 17 30 30 26.5 58.5 64 70 64.5 60 50 24 32 32 24 21 16 29 37 37 29 25 20 16 43.5 17 44.5 37 24 16 61.5 26.5 32 64 20 3/4" 26 30 74 78 41 49 26 74 30 41 78 49 1" 24 22.5 26.5 24.5 67.5 62.5 70 64.5 32 24 37 29 78 74 41 49 8 18 36 70 67.5 32 37 24 26.5 67.5 70 32 37 24 22.5

CL

20 20 25 30 36 36 40 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must

A

10 -0.4 ~ -0.2 3/8 25.6 30 14 18 RCD-025 20 8 20 41 1/4-28UNF 25 0~0.002 10 -0.4 ~ -0.2 3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42