Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Power Cylinder Series RHC

RHC-F100 Auto Switch Mounting Bracket Part Numbers (Band and screw included) Bore size (mm) Applicable auto switches 20 25 32 40 50 63 80 100 D-C73, D-C76, D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state D-B53, D-B54, D-B64, D-B59W Reed BA-01 BA-02 BA-32 BA-04 BA-05 BA-06

Fieldbus system EtherCAT compatible SI Unit

Installation 13 Installation 13 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 21 Specifications 24 Dimensions 25 End Plate Model Indication and How to Order 26 Summary of Product parts 27 Mounting and Installation 29 Wiring 29 Specifications 31 Dimensions 32 Maintenance 42 Troubleshooting 43

VXD21/22/23

VXD2150-06-2DS Made to Order Specifications Splashproof Specifications ( ) Based on JIS C 0920 Based on IEC529IP-X4 VXD Model Port size Electrical entry X36 DIN terminal or class H coil not available. 17-3-35 4 The VX series will be revised shortly. Series VXD21/22/23 Normally Open (N.O.)

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-43 43 Date issued: Photo copying this page is recommended.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Plug: KPP Applicable fitting size d Weight g D Model L A L A 4 KPP-04 6 32 13.8 0.4 D d 6 KPP-06 8 35 15.7 0.7 8 KPP-08 10 39 17.3 1.1 Applicable fitting size d 10 KPP-10 12 43 19.2 1.7 12 KPP-12 14 45.5 20.7 2.5 The plug is commom for KPQ, KPG and KP series. 360 KP/KPQ/KPG Series Specific Product Precautions 1 Be sure to read this before handling the products.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

-B 3 70.8 3/4 30.4 50 1/8 54 8 75 44 55.5 93.2 8.5 35.8 10.5 33.8 70 M42 x 1.5 2.3 33.8 37 42.5 21 7 10-/21-AR50K-B 3.2 80.3 3/4, 1 40 70 1/8 66 7 90 65.8 44 125.2 11 43 13 43.3 90 3.2 43.3 10-/21-AR60K-B 3.2 80.3 1 44.5 70 1/8 4.5 66 95 65.8 44 129.6 11 46 13 43.3 90 3.2 43.3 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

155

Refer to front matters 42 and 43 for Safety Instructions, and pages 17 to 19 for 2 Port Solenoid Valves for Fluid Control Precautions. Light / Surge Voltage Suppressor M12 Connector Caution Caution Conduit terminal 1. M12 connector types have an IP65 (enclosure) rating, offering protection from dust and water.

Auto Switch Guide

BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

Check Valve Series AK 1

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

Air Pilot Operated

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

(Including Bracket, Screw, Set Screw) Applicable bore size [mm] 32 40 50 63 80 100 125 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)

Check Valve Series AK

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

Air Pilot Operated Series NVSA

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

30

(mm) a b Note 2) Effective area (mm2) W Note 1) D W Weight (g) L1 L2 P M1 M2 N O Model P 3.2 4 6 8 10 12 4 6 8 10 12 16 KQB2U23-04 KQB2U04-06 KQB2U06-08 KQB2U08-10 KQB2U10-12 KQB2U12-16 3.2 3.2 4.2 4.2 4.2 4.2 5.6 5.6 8 8 8 8 3.2 4.2 13.4 25.6 40 57.4 8.5 11.9 19.3 32 47.6 67.6 9.1 11.4 13.7 16.6 18.7 24.6 27 29.3 33.7 38.3 43 47.4 10.8 11.2 12.2 13.8 14 15.6 8.1 9.1 11.5 14.6 17.6 19.8 16.4

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.