REA/REB

x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25 28 72 125 REBR32 35 79 148 66 Sine Rodless Cylinder High Precision Guide Type Series REBR Max.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

X 0.8, Rc (PT) 1/8, C4 (4 One-touch fitting) C6 (6 One-touch fitting) M5 X 0.8 Rc (PT)1/8 Port size M5 X 0.8 A port VZ M5 X 0.8 X port (1) M5 X 0.8 M5 X 0.8 VT Body ported style SYJ5l2/SYJ5l2R 3.4 (0.19) Valve effective area (mm2)(Cv) (2) VT M5: 3.3 (0.18) 1/8: 4.8 (0.27) C4, C6: 3.8 (0.21) Base mounted style SYJ5l4/SYJ5l4R M5: 3.8 (0.21) 1/8: 4.7 (0.26) VP Note 1) Only for external pilot

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 8 M 27 Bottom view of MXQ12-40 13225 8.5 18.5 KA NA x M4 x 0.7 thread depth 4 9 39 29 5 8.5 18.5 K 4.8 19 0.3 29.2 30 Z ZZ G (NN 1) x H H 16 8 16 8 A B 4.2 4.2 9 8.5 9 1 A B NN x M5 x 0.8 thread depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

CL

locking port Pneumatic locking and spring and pneumatic locking M5 x 0.8 unlocking port Unlocked when pressurized Lock nut 6 71 46 M5 x 0.8 Rod side cylinder port 31 20 14 M14 x 1.0 M6 x 1.0 M5 x 0.8 Head side cylinder port 5 48.5 6.5 34 5 6 50.5 18 Width across flats 10 20 32 18 2.3 2-5.5 Mounting hole 6 9 9.5 11.5 111 + Stroke 150 + Stroke 65 18 32 39 9-2-14 13 Series CLJ2 Fine Lock Cylinder

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

ZX

(mm) ZCU 24 VDC 24 VDC Supply voltage AMJ Suction filter unit ZX1-F Operating pressure range Vacuum to 0.5 MPa Misc. 30 m Filtration Air supply port M5 (Standard)/M6 (Option) Unit Manifold Vacuum pad connection port M5 (Standard)/M6 (Option) Air supply port Rc 1 8 Common specifications Exhaust port Rc 1 8 External pilot port M5 Stations Max. 8 units Refer to pages 13-2-8 to 13-2-18 for more

One-touch Fittings Series KQ2

D1 D2 L M A Nylon Urethane M5, M6 KQ2S04 to 12 KQ2S16 M5 0.8 M6 1.0 KQ2S04-M5 KQ2S04-M6 KQ2S04-01S KQ2S06-M5 KQ2S06-M6 KQ2S06-01S KQ2S06-02S KQ2S08-01S KQ2S08-02S KQ2S08-03S KQ2S10-01S KQ2S10-02S KQ2S10-03S KQ2S10-04S KQ2S12-02S KQ2S12-03S KQ2S12-04S KQ2S16-03S KQ2S16-04S 2.7 2.8 8 3.3 3.4 9 15 12 11 24 18 12 19 35 23 18 30 42 34 15.6 14.1 19 16.4 15 20 20 24 19.5 21 26 21.5 21 20 27.5 22.5

CY1

L LD M MM N P Q QW T TC W WP WS X Y Z PW Model CY1RG10 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 17.5 14 20 13 8 15 39.5 76 26 CY1RG15 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 19 17 25 16 7 18 54.5 94 32 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1RG20 62 5.6 5 M4 x 0.7 7 95 17 20.5 20 40 19 7 22 64 107 38 CY1RG25 70 5.6 6 M5 x 0.8 6.5 105 20 21.5 22.5 40 21.5 7 28 72 117 43

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

CRQ2

L2 max Y Y Y Y Y Size 10 15 20 30 40 (mm) Q2 Size 20 30 40 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 11-8-18 19 Simple Specials Series CRQ2 -XA31 to XA46 Symbol: A39 Symbol: A40 Symbol: A41 Shaft with through-hole Minimum machining diameter for d1 is 0.1 mm.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

0.4

D side U side Stations n 8 7 6 5 4 3 2 1 C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 25 40.7 B B B B B B B B X X P P 7.7 18.7 (12) A A A A A A A A 9.3 (7.5) P = 10.5 31.5 18 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread With ejector unit: Formula L1

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

10-SV200(R)-W-02 18 19 9.5 73.3 17 61.1 17 2 x 4.3 (For mounting) M5 x 0.8 (Pilot EXH port) 15.5 15.5 48 9.3 4 A B SMC A B 35 A B PE X EA P EB Manual override 56 5.3 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (External pilot port) 108.5 (L = 300 to 5000) 102.9 M12 waterproof connector 51 22 9.5 18 18 4.5 4.5 1/4 (Piping port) 28 3 position

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

Modular Design with Uniform Body Style

*18 *18 *18 *18 *1 Drain guide is NPT1/8 (applicable to the AC20-D) and NPT1/4 (applicable to the AC30-D to AC60-D).