Air Cylinder Series CM2

x 0.8, 1/8 Note 1) M5 x 0.8, 1/8 Note 1) 1/4 1/4 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note 1) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1162 Series 10-, 11-CM2X Microspeed Cylinder for

Micro Mechanical Valve Series VM1000

T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F .O.F .* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

MXQ

end) 14 6.5 F 4-M5 x 0.8 thread depth 7 49 3.5 1 14.5 28 24.5 24.5 29 24 58 Retraction end adjuster 6 N-M5 x 0.8 thread depth 6 11 5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA

15

x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 14 4.5 NY M4 x 0.7 7 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NW M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 2.5 M4 x 12 1.5 9 4.5 NU M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NT M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 1.5 M4 x 12 1.5 12 8.5 NM2 M4 x 0.7 8 50 38.2 11.5 60 M3 x 12 1.5 M4 x 12 2.7 10 12 32 NZ M5 x 0.8 9 70 50

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) (13) (13) M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 M12 x 1.25 M14 x 1.5 11 11 11 12 13 13 20 25 32 40 50 63 80 100 Bore size (mm) S ZZ 77 77 79 87 102 102 stroke 0.25 147 157 159 187 218 218 20 25 32 40 50 63 The minimum stroke with rod boot is 20 mm.

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

Air Cylinder

5.5 10 M10 x 1.25 34.5 26 0 0.033 1/8 78 109 40 1 to 300 24 21 22 14 52.4 M8 x 1.25 depth 14 36 27 11 34 8 46.5 7 12 M14 x 1.5 42.5 32 0 0.039 1/4 104 138 Female Rod End (mm) With Air Cushion (mm) Bore size A1 H KA MM ZZ 20 8 10 6 M4 x 0.7 86 25 8 10 8 M5 x 0.8 86 32 12 10 10 M6 x 1 88 40 13 10 12 M8 x 1.25 114 Bore size WA WB W 20 27 13 8.5 25 27 13 10.5 32 27 13 11.5 40 32 16 15 * When

5 Port Solenoid Valve Series VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 926 Body Ported Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12C Stations Grommet (G) U side D side One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" L3 L4 46.2 (For M5) 4 L5 M5 x 0.8 [4(A), 2(B) port] 13 SJ 8.5 (8) (5.5) SY Approx. 300 (Lead wire length) 104.2 95.6 34.2 25.6 25.6 23.5 5 R1 3

1

3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A

Table of Contents

Refer to page 3-13-4.)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 788 MXS 1322Air Slide Table Dimensions: MXS16 1322Basic 2 x M5 x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread

Table of Contents

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

SMC

4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

Valve Single Unit

Triangle mark position Stations n 11 stations 12 13 14 15 16 17 18 19 20 stations 310.5 323 235.5 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 300 312.5 225 237.5 237.5 250 262.5 27.5 287.5 300 286.5 297 202.5 213 223.5 234 244.5 255 265.5 276 12 13 16.5 17.5 12 13 14 15 16 17 1-6-96 Base Mounted Series SX3000/5000 SS5X3-45PDStations U(26 pins) C4 C6 (Pitch

ZP3

Form w 1 Material 10 N S U F GN GS 2 10 10 11 2 C ZP3 B 13 13 14 3 16 16 17 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 10 to 16 w q ZP3 B T N 10 A5 M5 x 0.8 Width across flats 10 e Connection thread (Male thread) 10 3 A5 M5 x 0.8 Model Vacuum inlet

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.