3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

0.4

The total number of solenoids (points) must not exceed 24. (26P) (20P) 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 574 VQC Series Plug-in Unit Base Mounted P IP40 compliant VQC1000/2000 Series Kit (Flat ribbon cable) (L4) (L3) L2 L1 VV5QC11 (5.25) 51 63.5 28 1.5 P = 10.5 1.5 35 Manual override 13 (12) SV Indicator light (35) (5.5)

IDX-OM-W014

) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm

Basic Type/Direct Mount Type

CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 CY3B CY3R CY3B CY3R M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 CY1S M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 CY1L M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 CY1H M8 x 1.25 M10 x 1.5 P (Piping port) CY1F W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).

90

Air consumption (per unit) 0.058 m3/min (ANR) 0.085 m3/min (ANR) J (= Unit of conversion of A) Air consumption (for total operation) 6,525 m3/year 95,625 m3/year K = J x 60 x I Power consumption 2 0.19 kW 0.27 kW L (Theoretical value obtained from A and B) Power consumption cost per year 5,344 yen/year 75,938 yen/year M = C x I x L 1 Adsorption time is the time in a cycle when the ejector

VZ100/300/500

Material Aluminum die-casted Note Platinum silver Black Black Description Sub-plate Material Aluminum die-casted Epoxy/Stainless steel NBR Description No. q w e r t y DXT200-13-1P Piston plate Body DXT170-C13 x 11 x 1 Solenoid assembly O-ring Resin Aluminum die-casted Common with VZ100 End cover Piston Spool valve assembly Spool spring Thread type Resin Sub-plate part no.: DXT200-13-1P Nil

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) Indicator light (5.25) Power supply terminal block (Terminal screw M3) L2 L1 27 P = 10.5 29 13 63.5 (12) 13 Indicator light Manual override (5.5) (35) A A A B A B A B A B A 93.5 66 2 40 (7.5) (12) 4.5 4 x M4 mounting hole 63.4 43.8 Triangle mark indicator position Stations 8 7 6 5 4 3 2 1 n D side U side Applicable connector: Flat ribbon cable connector (20P) (Complies with MIL-C

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) Indicator light (5.25) Power supply terminal block (Terminal screw M3) L2 L1 27 P = 10.5 29 13 63.5 (12) 13 Indicator light Manual override (5.5) (35) A A A B A B A B A B A 93.5 66 2 40 (7.5) (12) 4.5 4 x M4 mounting hole 63.4 43.8 Triangle mark indicator position Stations 8 7 6 5 4 3 2 1 n D side U side Applicable connector: Flat ribbon cable connector (20P) (Complies with MIL-C

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

3 Port Solenoid Valve

Bracket Mounting Procedure q Fit the bracket to the groove at the connector block (end block). w Tighten the screws (Tightening torque M3: 0.6 Nm). Tighten the screws (Tightening torque M3: 0.6 Nm). Note) The bracket can be mounted on the block with the mounting nut (Metric size: M3) only.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

CXS

) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x

CXS

head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions

MHF2

) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x

MHF2

4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

ML2B KB JB JA KA LB LA ME MD LC MA MB MC N P PA 19 29 19 29 39 20.5 30.5 40.5 47 67 47 67 PB PC HE HD HC Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 2 20 30 28 38 48 32 42 52 55 75 64 84 C J G5-S 14 3 5 3 4 14 9.5 7.5 13 7.5 8 4.5 1.6 M2 x 0.4 6.2 M3 x 0.5 M3 x 0.5 CV 3.5 17.5 4 11.6 M2.6 x 0.45 M4 x 0.7 M5 x 0.8 2.2 13 11

Escapements Series MIW/MIS

KB JB JA KA LB LA ME MD LC MA MB MC N P PA 19 29 19 29 39 20.5 30.5 40.5 47 67 47 67 PB PC HE HD HC Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 2 20 30 28 38 48 32 42 52 55 75 64 84 14 3 4 5 3 14 7.5 9.5 7.5 8 4.5 13 1.6 M2 x 0.4 6.2 M3 x 0.5 M3 x 0.5 3.5 17.5 4 11.6 2.2 M2.6 x 0.45 M4 x 0.7 M5 x 0.8 11 13 5 7 4 19 11 10

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

ML2B KB JB JA KA LB LA ME MD LC MA MB MC N P PA 19 29 19 29 39 20.5 30.5 40.5 47 67 47 67 PB PC HE HD HC Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 2 20 30 28 38 48 32 42 52 55 75 64 84 C J G5-S 14 3 5 3 4 14 7.5 9.5 13 7.5 8 4.5 1.6 M2 x 0.4 6.2 M3 x 0.5 M3 x 0.5 CV 3.5 17.5 4 11.6 2.2 M2.6 x 0.45 M4 x 0.7 M5 x 0.8 11 13