Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18 18 58 64.5 M18 x 1.5 M18 x 1.5 44 1/4 12 12 114 108 62 19 17 155 14, 20 counterbore depth 14 18, 26 counterbore depth 18 (mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 X ZZ 24 26 27 31 33 35 H 13 14 14 15

Series VQ Metal Seal/Rubber Seal Body Ported

185.5 77.5 88 162.5 173 67 77.5 150 160.5 56.5 67 150 160.5 25 35.5 112.5 123 46 56.5 137.5 148 L1 L2 (L3) (L4) 35.5 46 125 135.5 VQZ VQD Dimensions/Top entry connector [PU] (mm) n L 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 VZS 250 260.5 237.5 248 225 235.5 212.5 223 200 210.5 187.5 198 187.5 198 175 185.5 162.5 173 150 160.5 137.5 148 125 135.5 125 135.5 112.5 123 100 110.5 L3 L4 87.5 98

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

MK

14 Depth 10.5 Note 1) Above figure is for D-A73, A80.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77

Rotary Table/

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77 35H9

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 8 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 13 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 17 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 18 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 10 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 6 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 12 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 19 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 4 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 15 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)