Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

Electric Actuator

22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series

Tamper Proof and Flat Head Screw

across flats) D3 D4 A1 L5 A2 L6 T Metric sizes A1 A2 T M1 L1 L2 D4 D2 D3 d Model H D1 L3 L5 L6 L4 ASD230F-M5-04T 12.9 29.4 4 9.3 17.5 M5 x 0.8 28.4 7.8 11.7 4.5 9.6 10 8 31 0.7 30.7 ASD230F-M5-06T 13.7 32.5 11.6 6 20.6 ASD330F-01-06ST 14 13.7 38.5 11.6 6 22.9 38.9 R 1/8 32 10.6 7 11.8 14.2 12 1.5 35.6 ASD330F-01-08ST 15.8 18.5 44.8 15.2 8 28.2 38.2 ASD430F-02-06ST 17 43.5 12.8 6 25.2 18

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 12 5 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 14 6 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 16 8 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

21

14 32 16 13.5 8 42 8 10 46.4 M14 x 1.5 M32 x 2 Long Male Rod End P S ZZ Boss-cut Female Rod End Bore size 20 25 32 40 Bore size (mm) (mm) Bore size (mm) ZZ A1 8 H MM M4 x 0.7 ZZ 88 A 18 AL H 41 ZZ 109 Bore size 20 25 32 40 55 99 M5 x 0.8 20 25 32 40 20 25 32 40 56 103 86 M5 x 0.8 20 15.5 Rc1/8 62 109 90 8 22 20 M5 x 0.8 89 19.5 45 114 Rc1/8 67 125 96 12 22 20 M6 x 1 95 19.5 45 120 109 13

LEC-OM02704CN

13.8 EMC() 13-29 14 14114-50 14.1 142 14.2 144 14.2.1 144 14.2.2 144 14.3 145 14.3.1 145 14.3.2 146 14.3.3 147 14.3.4 147 14.3.5 147 14.3.6 148 14.3.7 148 14.3.8 149 14.4 14-10 14.4.1 14-10 14.4.2 14-15 14.5 14-18 14.5.1 14-18 14.5.2 14-20 14.5.3 14-21 14.5.4 (DIO) 14-24 14.5.5 ON/OFF 14-29 14.5.6 (DIO) 14-31 14.5.7 1ON/OFF() 14-32 14.5.8 14

VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Membrane Air Dryer

Specific Product Precautions Unit Type SMC SMC A Port size: 1/4, 3/8 70 Purge air for 55 57 dew point indicator Drain Discharge 41 With float type auto-drain 7 22 41 35 35 M V 14 82 OUT IN D N.C.: Gray 156 7 Applicable tubing O.D.: 10 14 129 4 C (NPT threads: 3/8 inch) B With drain guide E Purge air Purge air for dehumidification for dehumidification Drain Drain Thread size: 1/4 (Without

Mechanically Jointed Rodless Cylinders

41.5 61 20 M5 x 0.8 8 M5 x 0.8 112.5 11 32.5 2 14 45 9 7.5 128 6.6 48.5 76 22.5 M6 x 1 12 M6 x 1 138 14 38 2 18 54 12 12 160 8.6 58 90 27 M6 x 1 12 M6 x 1 155 14 49 3 16 67 14 15.5 190 9 60 112 27 M8 x 1.25 16 M8 x 1.25 178 17 60 3 20.5 84 16.5 22 220 11 68 134 31 PG 4 NE NG NH NW PA PB PC PD 9.7 PE 8.5 PF Q QW T TT UU YW Z P Model MY3B16 MY3B20 MY3B25 MY3B32 MY3B40 MY3B50 MY3B63 M5 x 0.8

AIR COMBINATION

57.2 35 7 14 4 41 AC30-B 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20

REC

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 2 44 36 37.4 60 M8 x 1.25 16 80 146 4 32.2 60 205 to 500 227.6 190.2 505 to 800 262.6 225.2 LAT LZ Body Bottom Tapped [mm] Size Stroke range [mm] Without lock With lock F G W X Z W X Z Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 25 15 to 100 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40

REC

10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150 to 700 M26 X 1.5 25 9 146 14 221 230 150 to 700 M26 X 1.5 32 9 159 14 234 243 150 to 1000 M32 X 2 40 11 181 18 270 281 200 to 1000 REC D/Double clevis 2-Rc(PT)P NN CDH10+0.058 0 G Relieving port M5 X 0.8 G Standard port H1 Width across flats B1 I

AC Servo Motor Driver (CC-Link Type ）

/enable of I/O devices (DIO) . 14-31 14.5.7 Input devices ON/OFF (test operation) . 14-32 14.5.8 Test operation mode . 14-33 14.5.9 Alarm history . 14-39 14.5.10 Current alarm . 14-40 14.5.11 Point table . 14-41 14.5.12 Driver group designation . 14-47 14.5.13 Other commands . 14-48 15.

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)