AS

Metric size Inch size 23 04 06 08 10 12 Thread type 01 03 05 07 09 11 13 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 Port size M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N Use 1/8" tube.

42

For replacement parts, refer to page 531. 519 A VQ5000 Series Kit (Connector kit) C 61.8 1/8" PE. port 29.5 29.5 12 21 47.5 PE 5 R1 3 R2 1 P SMC 3/4" 1(P), 5(R1), 3(R2) port 123 133 106 15 83.5 9 9 U side 55.5 M5 x 0.8 Ground screw 34.5 n 12 X 3/8", 1/2" 4(A), 2(B) port B 2 A 4 Manual override 6 Indicator light B 2 A 4 A B SMC SMC SMC SMC SMC 5 B B B B B A B 2 A 4 A B 4 A L2 P = 41 58.5 L1

ZP

Size 10, 13, 16 Size 40, 50 Flat Flat Deep: ZPY40D only Deep: ZPY10D/16D only Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 M5 x 0.8 (Miniature tube fitting Series M5) Hexagon width across

Vacuum Module Series ZX

Note 2) M5: Suffix -4, M6: Suffix -1 Note 3) M5: Suffix -1, M6: Suffix -2 Adapter D P3200152-12 (M2.5 x 28) Philips screw ZF M2.5 x 12 Philips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) Adapter D (2) Individual spacer R1 ZP M2.5 x 12 Philips screw Adapter D individual spacer R1 assembly Assembly no.

Table of Contents

AC55B AC60B 71 11 25 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 4.5 27 7 28 20 25 0 26 13.5 89 4.5 2.8 40 114 26.5 40 83 5.5 12 33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5

Air Cylinder

10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 13 14 8 29 8 12 2 35 5 26 M4 x 0.7 5 6 14 M8 x 1.25 24 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 33 10 14 2 40 6 31 M5 x 0.8 5.5 8 16 M10 x 1.25 29 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 40 12 18 2 40 6 38 M5 x 0.8 5.5 10 20 M10 x 1.25 35.5 40 Up to 300 301 to 1500 13 10

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

3 Port Air Operated Valve Series SYJA300

0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5

Table of Contents

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Modular/F.R.L. Units Series AC

4 1/4 3 35 45 42.5 74 42.5 235 74 185 36 38 77.5 75 34 Optional specifications Semi-standard specifications Bracket mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model V M N Q1 Q2 R1 R2 S U B B B B B AC20C AC25C AC30C AC40C AC40C-06 29 3.2 12 5.5 5.5 33 24 43 30 132 118 114 41 4 14 7 7 35 57 176 41 184 151 150 156 41 4 14 7 7 35 57 179

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) C1 X H1 L1 12 16 20 25 9 10 12 15 10.5 12 14 17.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 15.5 18.5 22.5 Auto switch shown above is D-A73 type and D-A80 type.

F

19.7 8 14 KQK08-U02 14 15.2 12 20.5 22 35 18.5 19.7 8 38 KQK08-U03 17 15.2 12 20.5 23 36 18.5 19.7 10 18 KQK10-U01 17 18.5 17 24 22 38 21 30.9 10 14 KQK10-U02 17 18.5 17 24 23.5 40.5 21 30.9 10 38 KQK10-U03 17 18.5 17 24 24 41 21 30.9 10 12 KQK10-U04 22 18.5 17 24 27 42 21 30.9 12 14 KQK12-U02 17 20.9 17 25 24 42 22 44.5 12 38 KQK12-U03 17 20.9 17 25 24.5 42.5 22 44.5 12 12 KQK12-U04 22 20.9

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 X 0.8 20 stations 20 P Port Note) If more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port. M5 X 0.8 SY 41 Type Applicable solenoid valve SYJ314-l SYJ314M-l SYJ324-l SYJ324M-l How to Order SS3YJ3-41-05 --M3 SYJ 41 Type S41 Type Coil is located on same side as the A port.

Valve Single Unit

single solenoid) A/B port size Thread piping 03 3 stations SX3000-23-1A Manifold base (6 stations) SS5X3-41P-06-C6 Applicable series Symbol Port size M5 x 0.8 12 12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

NCG/CG1

13 17 17 19 27 27 32 41 10(12) M4 x 0.7 depth 7 M8 x 1.25 Rc 1/8 106(114) 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 201 to 350 29 M5 x 0.8 depth 7.5 Rc 1/8 10(12) M10 x 1.25 111(119) 301 to 400 35.5 M5 x 0.8 depth 8 Rc 1/8 10(11) 10(12) M10 x 1.25 113(121) 301 to 450 44 M6 x 1 depth

5-Port Solenoid Valve

B 12 B 12 B 12 B 12 5.5 8.8 4 x M5 Mounting hole (Recommended tightening torque: 2.9 Nm) 20.7 L2 1.5 (Station n) (Station 1) 85.8 (Slide locking manual override) Panel fitting dimensions 2 (12) 60 16 82.7 56.6 48.7 19.5 9.1 115 (14.5) (23.9) (Fitting for the type with P/E ports on the U and/or D sides) (A, B port: 12) L2 4 x M5 Mounting hole 4 x 5.5 (Pitch) P = 19 (Pitch) P = 19 (21.7) 39.5

SMC Pneumatic Clean Series

37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 45 41 41 37 M26 x 1.5 M26 x 1.5 M20 x 1.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 154 122 120 116 21 19.5 19.5 15.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 With air cushion Cushion valve (Width across flats 1.5) WB C2 2-FD Relief port M5 x 0.8 2-NN GB WC WA GA GC B 2-P Width across

KR

(mm) <M5> (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5