Compact Cylinder with Lock Series CLQ

40 50 63 80 100 Additional weight Unit: g 20 35 6 4 2 152 127 121 25 45 12 8 3 174 149 140 32 64 26 17 3 137 174 159 40 77 27 17 7 149 208 192 50 118 53 32 9 221 351 326 63 158 53 32 18 288 523 498 80 261 120 49 31 638 998 959 100 380 175 116 56 1009 1307 1251 Bore size (mm) Magnet Threads Nut Rod end male threads With rubber cushion Foot type (includes mounting bolt) Front flange type (

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

CLQ

Additional Weight (g) 20 25 32 40 50 63 80 100 Bore size (mm) 77 27 17 7 149 208 192 64 26 17 3 137 174 159 Magnet 380 175 116 56 1009 1307 1251 45 12 8 3 174 149 140 118 53 32 9 221 351 326 158 53 32 18 288 523 498 261 120 49 31 638 998 959 35 6 4 2 152 127 121 Thread Nut Rod end male thread With rubber bumper Foot style (Including mounting bolt) Auto switch mounting screw (M3 x 0.5 x 10l

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

32.5 B 22 22 29.5 32.5 B 17 17 19.5 22.5 21.5 21.5 22.5 24.5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 12 16 20 25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20 25 4.5

Fieldbus System

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4

Series KP/KPQ/KPG

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21

Series KP/KPQ/KPG

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21

LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 224 17 Courtesy of Steven Engineering

Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

SZ3000

Refer to pages 32 through 35 for safety instructions and common precautions.

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

32 74 9.3 17 32 74 CRBU2 1.5 MPa Allowable surge pressure CRB1 Within 1 Backlash (2) + 4 0 MSU Tolerance in rotating angle Note 1) Output under the operating pressure of 0.5 MPa.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

32 74 9.3 17 32 74 CRBU2 1.5 MPa Allowable surge pressure CRB1 Within 1 Backlash (2) + 4 0 MSU Tolerance in rotating angle Note 1) Output under the operating pressure of 0.5 MPa.

Table of Contents

IDF4E to 11E IDU3E to 6E IDF4E, 6E, 8E, 11E IDU3E, 4E, 6E 34 Circuit breaker Signal cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection Terminal block 32 97 15 Power cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection 40 67 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Modular F.R.L. Unit

Note 3) For M5 and NPT thread types.

Plate Cylinder

19 CI 17 22 27 32 38 CJ 7 10 10 14 16 DA 53 67 85 103 122 DB 23 27 31 37 48 DDH10 DE 3.5 3.5 3.5 5.5 6 DF 4 7 10 12 14 DH 11 13 13 17 19 DI 17 22 27 32 38 DJ 7 10 10 14 16 Part no.